High-power array light-emitting diode (LED) chip surface radiating structure and manufacturing method
A technology of LED chip and heat dissipation structure, applied in the direction of semiconductor/solid-state device parts, semiconductor devices, electrical components, etc.
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[0056] The present invention will be further described below with reference to the embodiments and accompanying drawings.
[0057] see Figure 13 , the cross-sectional view of the surface heat dissipation structure of the high-power array LED chip of the present invention, the substrate 1 is the most common sapphire substrate, the distance between the adjacent light-emitting units 2 and 2' is 10-30 microns, and the light-emitting units 2 and 2' are connected by bridges. The metal is connected. Although the isolation trench 3 between the light-emitting units 2 and 2' is filled with a silicon dioxide layer and a titanium / aluminum / titanium / gold bridge layer, the trench still has a certain depth. Easy to hide bubbles. When the light-emitting unit emits light, a large amount of heat will be generated, and this part of the heat will diffuse in all directions. The thermal conductivity of sapphire is poor. If this part of the heat is not properly handled, the temperature of the light...
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