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Piezoelectric electret film and preparation method thereof

A piezoelectric electret, thin film technology, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc. Reliable lamination of solid outer layers, etc., to achieve the effect of good performance, simplified operation and cost saving

Inactive Publication Date: 2014-03-26
NEWNAGY TANGSHAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] It has recently been disclosed that layer systems with porous or perforated intermediate layers often have much larger piezoelectric constants than the above systems, but these intermediate layers cannot be reliably laminated with solid outer layers
And the perforation of the middle layer is usually very time-consuming

Method used

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  • Piezoelectric electret film and preparation method thereof
  • Piezoelectric electret film and preparation method thereof
  • Piezoelectric electret film and preparation method thereof

Examples

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preparation example Construction

[0039] The invention provides a method for preparing a piezoelectric electret film, comprising steps: (1) coating a polymer solution on a template with protrusions, and then drying; after drying, removing the template to obtain a template with pits (2) combining the dried first polymer film of step (1) with at least one second polymer film to form a cavity; and (3) making step (2) ) The inner surface of the cavity formed is charged, thereby forming a piezoelectric electret film.

[0040] Attached below Figure 1-5 The contents of the present invention will be described.

[0041]Wherein, step (1) is a process of forming the polymer film into a polymer film of a suitable shape as required. In this step, the thickness of the coating polymer is greater than the height of the protrusions on the template to ensure that the depth of the pits on the obtained first polymer film layer is consistent with the height of the protrusions on the template, so as to satisfy the piezoelectric ...

Embodiment 1

[0054] Put 1g of PVDF into a 100mL beaker, use a 10mL graduated cylinder to measure 8ml of dimethylacetamide (DMF) into the beaker to dissolve PVDF (11.7wt%), then seal the beaker with plastic wrap, ultrasonic for 30min, PVDF All dissolved, and later used.

[0055] The above prepared PVDF solution is evenly and directly coated on the prepared PDMS soft template with cuboid protrusions by spin coating (the height of the raised cuboid of the template is 10 microns, and the bottom surface is a square with a side length of 6 microns, The interval between the protrusions is 10 microns), and the coating is controlled so that the thickness of the PVDF film after drying is 100 microns. After coating, it is placed in a vacuum dryer at 80° C. for 1 hour. After drying, the PDMS soft template was removed. A PVDF film with a pit array is obtained, and then a layer of PVDF film is coated on the surface of the pit film by spin coating to adjust the depth of the pits so that the depth of the...

Embodiment 2

[0059] Put 2g of PVDF into a 150mL beaker, use a 20mL graduated cylinder to measure 15ml of dimethylacetamide (DMF) into the beaker to dissolve PVDF (11.7wt%), then seal the beaker with plastic wrap, ultrasonic for 30min, PVDF All dissolved, and later used.

[0060] The above prepared PVDF solution is evenly and directly coated on the prepared PDMS soft template with cuboid protrusions by electrostatic spraying (the height of the raised cuboid of the template is 10 microns, and the bottom surface is a square with a side length of 6 microns. The distance between the coatings is 10 microns), and the coating is controlled so that the thickness of the PVDF film after drying is 100 microns. After coating, it is placed in a vacuum desiccator at 80°C for 1 hour. After drying, the PDMS soft template was removed. Obtain a PVDF film with an array of pits, and then coat a layer of PVDF film on the surface of the pit film by electrostatic spraying method to adjust the depth of the pits s...

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Abstract

The invention relates to a preparation method for a piezoelectric electret film. The method comprises the following steps: (1) spraying a polymer solution on a template with bulges for drying, and after drying, removing the template to obtain a first polymer film with concave pits; (2) combining the dried first polymer film with a second polymer film to form a cavity; (3) distributing opposite charges on the opposite surfaces in the cavity through polarization to form the piezoelectric electret film. The invention provides the piezoelectric electret film prepared through the method. The piezoelectric electret film comprises the first polymer film (1) with the concave pits, the second polymer film (3), the cavity (2) and the opposite charges, wherein the second polymer film (3) is combined with the surface with the concave pits of the first polymer film (1), and the cavity (2) is formed between the first polymer film (1) and the second polymer film (3); the opposite charges are distributed on the surfaces of the cavity through polarization. The concave pits are formed by coating the template with the bulges with the polymer solution.

Description

technical field [0001] The invention relates to a piezoelectric electret film and a preparation method thereof, in particular to a piezoelectric electret film manufactured by template processing and a preparation method thereof. Background technique [0002] Common dielectrics are polarized under the action of an external electric field, and when the external electric field is removed, the polarization of the dielectric also disappears. Electret is a dielectric with long-term charge. Its charge can be polarized charge that is "frozen" due to polarization, or it can be positive and negative charges caught in a "trap" on the surface or in the body. Similar to permanent magnets with residual magnetism, people also call dielectrics with long-term retention of electric charges permanent electric bodies, which are customarily called electrets. [0003] Electrets are used in industrial technology, medicine, biology and other fields, mainly including electret microphones, electret ...

Claims

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Application Information

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IPC IPC(8): H01L41/45H01L41/083
Inventor 范凤茹刘军锋
Owner NEWNAGY TANGSHAN
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