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Method and device for implementing vacuum high-precision window

A realization method and high-precision technology, applied in installation, optics, instruments, etc., can solve the problem of low surface shape accuracy, and achieve the effect of improving surface shape accuracy, facilitating disassembly and maintenance, and satisfying optical path difference.

Active Publication Date: 2013-09-04
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] The purpose of the present invention is to propose a method and device for realizing a vacuum high-precision window, so as to solve the problem of low surface accuracy of the vacuum window in the prior art

Method used

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  • Method and device for implementing vacuum high-precision window
  • Method and device for implementing vacuum high-precision window

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Experimental program
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Effect test

Embodiment 1

[0027] Embodiment 1: A method for realizing a vacuum high-precision window includes the following steps:

[0028] Step 1: using n pieces of window glass to form an optical window, and the n pieces of window glass are arranged horizontally and sequentially so that a closed cavity is formed between each adjacent two pieces of glass;

[0029] Step 2: vacuumize the multiple closed cavities formed in Step 1;

[0030] Step 3: Fill dry nitrogen into the multiple closed cavities that have been evacuated in step 2, so that the pressure in the multiple closed cavities increases sequentially.

[0031] The pressure in the plurality of closed cavities described in step 3 is increased successively to specifically meet the following requirements: one side of the first piece of window glass in contact with the vacuum is a vacuum, and one side is 1 / n atmospheric pressure; one side of the second piece of window glass It is 1 / n atmospheric pressure, and one side is 2 / n atmospheric pressure... O...

Embodiment 2

[0040] Embodiment 2: The difference between this embodiment and Embodiment 1 is that neon gas is filled in a plurality of vacuumized closed cavities.

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Abstract

The invention relates to a method and a device for implementing a vacuum high-precision window, which belong to the technical field of optical-mechanical-electrical engineering and aim at solving the problem in the prior art that the surface shape of the vacuum window is low in precision. The invention relates to a method for implementing a step differential pressure type vacuum window. The method comprises the following steps: fixing an installing seat on an installing interface through a screw nail; installing window glass A on a microscope base A through a pressing ring as well as a sealing ring A, a sealing ring B and a sealing ring C; uniformly distributing a plurality of flexible adjustment knobs A between the microscope base A and the installing seat on the circumference; installing window glass B on a microscope base B through a pressing ring and a sealing ring; installing a metal corrugated pipe B and the microscope base B as well as the microscope base A in a sealing manner through the sealing rings; uniformly distributing a plurality of flexible adjustment knobs B between the microscope base A and the installing seat B on the circumference; and continuously installing n pieces of window glass A or window glass B. According to the method and the device for implementing the vacuum high-precision window disclosed by the invention, the operation is simple, the surface shape precision is high, the structure is simple, and the device is convenient to disassemble and maintain.

Description

technical field [0001] The invention belongs to the technical field of optical-mechanical-electrical engineering, and in particular relates to a method and a device for realizing a vacuum high-precision window. Background technique [0002] The main feature of the vacuum high-precision window is that one side is in a vacuum environment and the other is in an atmospheric environment. Therefore, on the basis of ensuring good and reliable sealing of the window, it should also ensure that the surface shape accuracy of the optical window under atmospheric pressure meets the requirements of the system. Application requirements; vacuum windows are widely used in optical equipment and its detection equipment, especially in infrared lenses, vacuum coating machines, vacuum detection tanks, vacuum state collimator and other equipment, in high-precision optical detection, optical imaging systems Among them, the vacuum window will serve as a unit component of the optical system and parti...

Claims

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Application Information

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IPC IPC(8): G02B7/00
Inventor 杨飞陈宝刚王富国张丽敏明名
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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