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Radio frequency ion source

A radio-frequency ion source and ion technology, applied in the field of radio-frequency ion sources, can solve problems such as the influence of radio-frequency electric fields, and achieve the effect of solving shielding problems and cavity discharge problems

Inactive Publication Date: 2013-08-28
DALIAN NATIONALITIES UNIVERSITY
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AI Technical Summary

Problems solved by technology

[0004] The invention solves the influence of the radio frequency electric field of the radio frequency ion source on other equipment and its shielding problem by sealing the radio frequency ion source in the cavity and using the cavity to shield the radio frequency electric field, and at the same time solves the problem of cavity discharge

Method used

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  • Radio frequency ion source

Examples

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Embodiment 1

[0025] A radio frequency ion source;

[0026] The radio frequency ion source comprises a quartz tube 1, a copper tube 2 wound on the outer wall of the quartz tube 1 and a shield 3 for shielding the radio frequency electric field, the quartz tube 1 and the copper tube 2 wound on the outer wall of the quartz tube 1 are placed In the shielding case 3, the upper end of the quartz tube 1 is provided with an air inlet 11, the air inlet 11 is provided with a volume flowmeter for controlling the gas flow, the lower end of the quartz tube 1 is provided with an ion injection port 12, and the quartz tube 1 is provided with an ion injection port 12. The tube 1 is provided with a thermocouple vacuum gauge for measuring the pressure inside the quartz tube during discharge. The two ends of the copper tube 2 are connected to the two ends of the radio frequency power supply. 200W, one end of the copper pipe 2 is provided with a water inlet, and the other end is provided with a water outlet, an...

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Abstract

The invention relates to a radio frequency ion source and belongs to the technical field of plasma application. The radio frequency ion source comprises a quartz tube, a copper tube wound on the outer wall of the quartz tube and a shielding cover used for shielding a radio frequency electric field. The quartz tube and the copper tube wound on the outer wall of the quartz tube are arranged in the shielding cover. An air inlet is formed in the upper end of the quartz pipe. An ion ejecting outlet is formed in the lower end of the quartz tube. Two ends of the copper tube are connected with two ends of a radio frequency power supply. A through hole for plasma to go through is formed at the center of the bottom of the shielding cover. The radio frequency ion source has the advantages that the shielding cover isolates the radio frequency electric field from a cavity and discharging of the cavity is prevented.

Description

technical field [0001] The invention relates to a radio frequency ion source, which belongs to the field of plasma application technology. Background technique [0002] In recent decades, with the rapid development of human society, the demand for energy is also increasing, but the available energy is less and less. The realization of controllable nuclear fusion has become a research hotspot in the world today. Controllable nuclear fusion has Two major problems: the steady-state plasma problem and the key material problem of the reactor. At present, many research groups in the world are carrying out research work in this area, but there are few studies on the first wall material of low-temperature plasma simulation irradiation fusion reactor and the radiation damage mechanism of the first wall material. This type of device capable of simulating fusion reactor irradiation is relatively rare at home and abroad, and the purpose and construction methods of the devices are also ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05H1/30
Inventor 刘东平杨德明范红玉
Owner DALIAN NATIONALITIES UNIVERSITY
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