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Structure of coupled local surface plasma and waveguide mode

A plasma and localized surface technology, applied in the field of integrated optoelectronics, can solve problems such as unsuitability for integration, miniaturization, practicality, high ambient temperature requirements, and bulky devices, and achieve on-chip integration, high FOM, and improved transmission. The effect of sensibility

Active Publication Date: 2013-08-28
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology

[0004] Among them, the first type of sensor, that is, the SPP-based sensor has a high resolution and has now reached 30,000nm / RIU, but it requires other conditions for coupling, such as prism coupling, and the device is bulky and requires high ambient temperature, which is not suitable for integration. Miniaturization and practicality

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  • Structure of coupled local surface plasma and waveguide mode
  • Structure of coupled local surface plasma and waveguide mode
  • Structure of coupled local surface plasma and waveguide mode

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Embodiment Construction

[0021] see figure 1 As shown, the present invention provides a structure coupled with localized surface plasmons and waveguide modes, including:

[0022] A substrate 1, the material of the substrate 1 is K9 glass or SiO 2 ;

[0023] A waveguide layer 2, the waveguide layer 2 is made on the substrate 1, the material of the waveguide layer 2 is ZrO 2 or TiO 2 , the waveguide layer 2 is a material with a high refractive index, and its refractive index is between 2.1 and 2.4. The high refractive index material can make the localized surface plasmon mode and the waveguide mode have stronger coupling. Because the loss of the waveguide mode is very small, the linewidth of its characteristic spectral line is generally very narrow. Coupling it with our localized surface plasmon can effectively reduce the loss of the entire structure. At the same time, the thickness of the waveguide layer 2 is us It can be controlled to adjust the coupling degree of the waveguide mode and the LSP mo...

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Abstract

The invention provides a structure of coupled local surface plasma and waveguide mode. The structure comprises a substrate, a waveguide layer manufactured on the substrate, and an Au particle layer manufactured on the waveguide layer. The structure can effectively reduce full width at half maximum of resonance line, thereby improving figure of merit (FOM) of sensors.

Description

technical field [0001] The invention relates to the technical field of integrated optoelectronics, in particular to a coupling structure of a localized surface plasmon and a waveguide mode with a high quality factor. Background technique [0002] In recent years, with the rapid development of biology, chemistry, and medicine, biosensing has become more and more important in molecular detection, disease diagnosis, food safety, and environmental detection. In the field of biosensing, due to surface Plasma is very sensitive to changes in the refractive index of the medium, and sensors based on surface plasmon (Surface Plasmon) have attracted more and more attention. [0003] There are two main types of sensors related to surface plasmons, one is based on surface plasmon polaritons (SPP) and the other is based on localized surface plasmon resonance (LSPR). They mainly rely on the detection of changes in the refractive index of the surrounding environment to cause changes in the...

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Application Information

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IPC IPC(8): G01N21/41
Inventor 宋国峰张祖银徐云胡海峰王立娜马勋鹏李康文
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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