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Method for compensating laser flatness measurement error

A compensation method and measurement error technology, applied in the direction of measurement devices, optical devices, instruments, etc., to achieve the effect of height reference assurance, improvement of projection accuracy, and vertical accuracy assurance

Inactive Publication Date: 2013-08-14
杭州鼎热科技有限公司
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Problems solved by technology

[0006] In order to overcome many technical problems caused by the traditional large-scale surface flatness detection system, the present invention provides a method for implementing laser flatness measurement error compensation

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  • Method for compensating laser flatness measurement error
  • Method for compensating laser flatness measurement error
  • Method for compensating laser flatness measurement error

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Embodiment Construction

[0043] In conjunction with the accompanying drawings, the present invention will be described in detail below.

[0044] 1. Main technical ideas

[0045] A laser flatness measurement error compensation method involved in the present invention, the main technical idea is that it is composed of three parts: sub-pixel image scattering compensation, reference inclination compensation, and spot variation centering compensation, which can effectively improve the laser flatness measurement system. measurement accuracy.

[0046] The sub-pixel image scattering compensation involved in the above technical route is to use the pixel edge recognition method to solve the scattering problem of the laser beam due to long-distance transmission, which can ensure the vertical accuracy of the plane measurement.

[0047]The reference inclination compensation involved in the above technical route uses the method of inclination transformation height to solve the problem of reference deviation in las...

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Abstract

The invention discloses a method for compensating a laser flatness measurement error. The method is characterized by consisting of sub-pixel image scattering compensation, benchmark dip angle compensation and spot abnormal change alignment compensation, so that the measurement accuracy of a laser flatness measuring system is effectively increased. In the sub-pixel image scattering compensation, the problem of scattering caused by long-distance transmission of laser beams is solved by using a pixel edge identifying method, and the vertical accuracy of planar measurement can be ensured. In the benchmark dip angle compensation, the problem of benchmark deviation of laser target placement is solved by using a dip angle height changing method, and the height benchmark of a laser target can be ensured; and in the spot abnormal change alignment compensation, the problem of abnormal change of spot size along with the change of a target distance is solved by using a reciprocating inching method, and the projection accuracy of a laser point is increased.

Description

technical field [0001] The invention relates to the fields of plane detection and surface topography evaluation, in particular to a method for implementing laser flatness measurement error compensation. Background technique [0002] With the continuous development of science and technology, the competition in modern industry is becoming increasingly fierce, product upgrading is accelerating, and precision requirements are constantly increasing. The continuous emergence of various new technologies, materials, and processes has brought great impact to the design, processing, testing, and control of modern industrial equipment. Flatness is one of the most basic equipment manufacturing and testing technical indicators, and its technical requirements are constantly improving, especially in the fields of special equipment such as metallurgy, mining, electric power, aerospace, aviation, ships and large molds. [0003] Flatness, also known as flatness, refers to the deviation of th...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/30
Inventor 陈尚俭郑俊谭大鹏
Owner 杭州鼎热科技有限公司
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