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Water-reactive al composite material, water-eactive thermally sprayed al film, process for production of thermally sprayed al film, and structural member for film-forming chamber

A composite material and manufacturing method technology, which are applied in the directions of fusion spraying, metal material coating process, sputtering coating, etc., to achieve the effects of improved weather resistance, simple process, and increased number of reuses

Active Publication Date: 2015-04-01
ULVAC INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the current situation is that only the individual film-forming materials that are balanced with the recycling cost are used as recycling objects

Method used

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  • Water-reactive al composite material, water-eactive thermally sprayed al film, process for production of thermally sprayed al film, and structural member for film-forming chamber
  • Water-reactive al composite material, water-eactive thermally sprayed al film, process for production of thermally sprayed al film, and structural member for film-forming chamber
  • Water-reactive al composite material, water-eactive thermally sprayed al film, process for production of thermally sprayed al film, and structural member for film-forming chamber

Examples

Experimental program
Comparison scheme
Effect test

reference example 1

[0054] 4NAl-3.0wt%In-0.1wt%Si (addition amount of In and Si, Al weight basis) obtained by blending 4NAl, In and Si in a predetermined ratio, and uniformly melting In and Si in Al is processed as The rod-shaped spraying material is sprayed by molten rod flame (heat source: C 2 h 2 -O 2 gas, about 3000° C.) is sprayed on the surface of a base material made of aluminum in an air atmosphere to form an Al sprayed film. The Al sprayed coating thus obtained was subjected to heat treatment at 0 to 350° C. (in air, for 1 hour, furnace cooling) instead of the heat history received from the film formation process. The substrate with Al sprayed coating before heat treatment (0°C) and the substrate with Al sprayed coating after heat treatment were immersed in 300ml of deionized water at 80°C, and the current density of the immersion solution was measured. Solubility of Al spray coating.

[0055] As a result, it was found that there is a relationship between the addition of Si and the s...

reference example 2

[0057]Using 4NAl as Al, the effects of adding In and Ti in the following Al-In-Ti compositions (a) to (d) were examined. The amounts of In and Ti added are based on the weight of Al.

[0058] (a) 4NAl-2.1wt%In-0.19wt%Ti

[0059] (b) 4NAl-1.2wt%In-0.18wt%Ti

[0060] (c) 4NAl-1.8wt%In-0.20wt%Ti

[0061] (d) 4NAl-3.0wt%In-0.17wt%Ti

[0062] Al, In, and Ti are blended in a specified ratio, and In and Ti are uniformly melted in Al and processed into a rod-shaped spraying material. 2 h 2 -O 2 gas, about 3000° C.), and sprayed on the surface of the substrate made of aluminum in the air atmosphere to form an Al sprayed film. Heat treatment at 0 to 350° C. (in the atmosphere, 1 hour, furnace cooling) was performed on each of the Al sprayed coatings obtained in this way instead of the heat history received from the film formation process. Substrates with Al sprayed coatings in the state before heat treatment (0°C) and substrates with Al sprayed coatings after heat treatment were ...

Embodiment 1

[0067] 4NAl-3.0wt%In-0.2wt%Si-0.2wt%Ti (In, Si and Ti The amount of addition, Al weight basis) processed into a rod-shaped spraying material, through the fusion rod flame spraying (heat source: C 2 h 2 -O 2 gas, about 3000° C.), in the air atmosphere, sprayed on the surface of the substrate made of aluminum to form an Al sprayed film. For the Al sprayed film (simulated deposited film) obtained in this way, the heat treatment time (0 to 500 hours) at 250°C in the air and the film removal property caused by immersion in 80°C deionized water were studied (film removal time (hours) ) and, for comparison, the film removal property was studied in the same manner as above for the case of an Al sprayed film composed of 5NAl-3.0wt% In (conventional Al sprayed film (simulated deposited film)).

[0068] The results thus obtained are shown in figure 2 . exist figure 2 Among them, the horizontal axis is the heat treatment time (hours) at 250° C., and the vertical axis is the film r...

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Abstract

Herein provided are a water-reactive Al-based composite material which is characterized in that it is produced by incorporating, into Al, 2.0 to 3.5% by mass of In, 0.2 to 0.5% by mass of Si and 0.13 to 0.25% by mass of Ti, and which can be dissolved in water through the reaction thereof in a water-containing atmosphere; a water-reactive Al-based thermally sprayed film produced using this composite material; a method for the production of this Al-based thermally sprayed film; and a constituent member for a film-forming chamber which is provided with this Al-based thermally sprayed film on the surface thereof.

Description

technical field [0001] The present invention relates to a water-reactive Al composite material, a water-reactive Al spray-coated film, a method for producing the Al spray-coated film, and a constituent member for a film-forming chamber, and particularly relates to a water-reactive Al in which In, Si, and Ti are added A composite material, a water-reactive Al spray coating composed of the water-reactive Al composite material, a method for producing the Al spray coating, and a film-forming chamber constituent member covered with the Al spray coating. Background technique [0002] In a film-forming device for forming a thin film by sputtering, vacuum evaporation, ion plating, CVD, etc., the film-forming process is inevitably adhered to the film-forming chamber components installed in the device. A film of metal or metal compound composed of film-forming materials. Examples of the constituent members of the film formation chamber include a non-adhesive plate for preventing the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C4/06C22C21/00C23C14/00C23C16/44
CPCC23C4/06C23C14/564C23C16/4404C09D1/00C22C21/00C23C14/00C23C16/44
Inventor 门胁丰斋藤朋子虫明克彦
Owner ULVAC INC
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