Micro hemispherical resonator gyro and preparation method thereof

Abstract

The invention discloses a micro hemispherical resonator gyro and a preparation method thereof, belonging to the field of micro / nano processing and manufacturing. The preparation method comprises the following steps of: performing ICP etching on a high-resistance silicon wafer to obtain a silicon body 1; depositing polycrystalline silicon and etching to obtain a preliminary electrode 3; depositing carbon dioxide on the front, and imaging to form a carbon dioxide mask 4; etching to obtain a hemispherical harmonic oscillator cavity 5 and an electrode 6; removing the carbon dioxide mask 4, and performing ICP etching on the back to obtain a support body cavity 7; depositing carbon dioxide insulating layers 8 on the front and back sides; depositing polycrystalline silicon on the front and back sides to obtain a hemispherical harmonic oscillator 9, a support body 10 and a signal loading electrode 11; and thinning and polishing on the front, removing excessive polycrystalline silicon and etching carbon dioxide to obtain the movable hemispherical harmonic oscillator 9. According to the invention, the support body cavity is processed, the carbon dioxide and polycrystalline silicon are deposited, and the size of the support surface of the support body is easily controlled; and electroconductive polycrystalline silicon is deposited and filled by use of a processing electrode tank, and the shortcoming of excessively small working area of a drive electrode and a sensitive electrode is overcome.

Description

technical field [0001] The invention relates to a miniature hemispherical resonant gyroscope and a preparation method thereof, belonging to the field of micro / nano processing and manufacturing. Background technique [0002] With the development of science and technology and the progress of society, consumer electronics, automotive products and guided weapons have further increased the requirements for the accuracy and reliability of micro-mechanical gyroscopes, which promote the continuous production of micro-mechanical gyroscopes with new structures and new principles, among which micro-hemispheres The resonant gyroscope has the advantages of high precision, high reliability and long life, and has become one of the new gyroscopes that have been studied in recent years. [0003] refer to image 3 , the existing miniature hemispherical resonator gyroscope, including the silicon body 1 on the insulating layer 8, the hemispherical resonator cavity 5 is arranged on the silicon b...

AI Technical Summary

Problems solved by technology

The support surface of this hemispherical harmonic oscillator is determined by the support surface of the outer ring support body, and the size of the outer ring support surface is determined by the wet etching time, solution concentration, stirring speed, etc., so the size of the support surface during processing Difficult to control, it may be insufficient to release, so that the supporting surface is too large, and it may be released too much, resulting in too small supporting surface, both of which seriously affect the working performance of the device; at the same time, the size of the working surface of the driving electrode and the sensitive electrode and the doping depth Related, due to the limitations of the doping process, a large working area cannot be obtained, and there are also disadvantages such as too small driving force and difficult detection of sensitive signals.

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