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Large-diameter-height-ratio ultra-precision hydrostatic pressure rotary table

A static pressure turntable, ultra-precise technology, applied in the direction of large fixed members, anti-centrifugal force rotating parts, bearings, etc., can solve the problems that the processing of key parts is difficult to obtain high precision, the moment of inertia of the rotary shaft system is large, and cannot fully meet the processing requirements , to avoid the increase of the moment of inertia, improve the machining accuracy and improve the rigidity

Active Publication Date: 2013-05-22
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, the above-mentioned prior art has the following deficiencies in varying degrees: as the processing of key parts is not easy to obtain high precision, the moment of inertia of the rotary shaft system is relatively large, the thrust plate has a large deformation under the action of hydrostatic oil pressure, and the height of the turntable It is difficult to reduce, so that the existing technology cannot fully meet the requirements of large ultra-precision machine tools for processing high-precision large-diameter aspheric optical parts

Method used

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  • Large-diameter-height-ratio ultra-precision hydrostatic pressure rotary table

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specific Embodiment approach 1

[0017] Specific implementation mode one: as figure 1 As shown, a large-diameter-to-height ratio ultra-precision hydrostatic turntable of this embodiment, the ultra-precision hydrostatic turntable includes a turntable base 1, a motor base 2, an oil receiving plate 3, a torque motor 4, a connection plate 5, Angle encoder 6, connecting shaft 7, encoder seat 8, lower floating plate 11, upper floating thrust plate 12, upper floating plate 14, lower floating thrust plate 15, inner spacer ring 16, radial bearing bush 17, main shaft 18, positioning installation shaft 19. Oil inlet pipeline 23, several radial restrictors 20, several floating restrictors 21 and several floating restrictors 22;

[0018] The upper floating thrust plate 12, the lower floating plate 11, the lower floating thrust plate 15 and the inner spacer ring 16 are all circular, the cross section of the upper floating plate 14 is circular, and the upper plane of the upper floating plate 14 can be used as the working su...

specific Embodiment approach 2

[0019] Specific implementation mode two: as figure 1 As shown, the floating liquid static pressure thrust oil film clearance and the floating liquid static pressure thrust oil film clearance of this embodiment are obtained by grinding the upper and lower surfaces of the inner spacer ring 16 to make it a negative tolerance. In this way, a large-diameter closed circular thrust surface is realized, which is beneficial to improve the machining accuracy, avoid a large moment of inertia and large deformation of the thrust plate, and is beneficial to improve the precision, rigidity and dynamic performance of the turntable. The undisclosed technical features in this embodiment are the same as those in the first embodiment.

specific Embodiment approach 3

[0020] Specific implementation mode three: as figure 1 As shown, the radial bearing bush 17 of this embodiment is provided with an oil return groove 17-2, and the first oil return pipe 9 is installed on the oil receiving pan 3, and the oil returning groove 17-2 is connected to the first oil return pipe 9 through the oil receiving pan 3 ; The second oil return pipe 10 is installed on the base 1 of the turntable, and the upper plane of the upper floating thrust plate 12 is provided with an annular oil return groove 12-2, which is connected to the third oil return pipe installed on the upper floating thrust plate 12 13. This design is convenient for installation and debugging, and prevents oil leakage. The undisclosed technical features in this embodiment are the same as those in the first or second specific embodiment.

[0021] working principle

[0022] When working, the hydraulic oil first enters several floating throttles 22, several downward floating throttles 21 and seve...

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Abstract

The invention discloses a large-diameter-height-ratio ultra-precision hydrostatic pressure rotary table, belongs to the technical field of ultra-precision manufacturing equipment, and meets the requirements of a large-size ultra-precision lathe used for machining high-precision large-aperture non-spherical optical parts. An upper floating throttler and a lower floating throttler are respectively installed on an upper floating thrust plate and a lower floating thrust plate, the upper floating thrust plate is fixedly connected with a base seat of the rotary table, the lower floating thrust plate is fixedly connected with the base seat of the rotary table through an inner isolation ring and is arranged in an annular groove of the upper floating thrust plate, a radial bearing bush is fixedly connected with the base seat of the rotary table through the lower floating thrust plate and the inner isolation ring, a main shaft is fixedly connected with an upper floating plate, and hydraulic oil is throttled through the throttlers and forms an upper floating liquid hydrostatic pressure thrust oil film between the upper floating plate and the upper floating thrust plate, a lower floating liquid hydrostatic pressure thrust oil film between a lower floating plate and the lower floating thrust plate, and a radial hydrostatic pressure support oil film between the radial bearing bush and the main shaft, so that an axial sealed-type liquid hydrostatic pressure plane round ring thrust bearing and a radial liquid hydrostatic pressure cylindrical bearing are formed. The large-diameter-height-ratio ultra-precision hydrostatic pressure rotary table is applied to the large-size ultra-precision lathe used for machining the high-precision large-aperture non-spherical optical parts.

Description

technical field [0001] The invention belongs to the technical field of ultra-precision manufacturing equipment, and relates to an ultra-precision hydrostatic turntable, in particular to an ultra-precision hydrostatic turntable with a large diameter-to-height ratio. Background technique [0002] With the development of a number of major scientific and engineering researches in the country, the demand for high-precision large-aperture aspheric optical components is increasing. The materials of these components are mostly hard and brittle difficult-to-machine materials. Conventional processing and testing methods can no longer meet their high-precision and high-efficiency processing requirements. Large-scale ultra-precision machine tools are an important guarantee for their deterministic batch processing. However, since the ultra-precision machine tools for processing large-diameter optical parts and their key components are products that are embargoed by foreign countries to m...

Claims

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Application Information

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IPC IPC(8): B23Q1/38
CPCF16C32/0696F16C2300/14F16C2322/39
Inventor 孙雅洲梁迎春刘海涛张景和吴九达
Owner HARBIN INST OF TECH
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