Single-chip three-shaft magnetic field sensor and production method

Abstract

The invention provides a single-chip three-shaft magnetic field sensor and a production method. The single-chip three-shaft magnetic field sensor at least comprises a first substrate, at least two first electrodes, at least four second electrodes, a second substrate, a single-shaft rotation structure, a double-shaft rotation structure, a first magnetic film structure and a second magnetic film structure, wherein the first electrodes and the second electrodes are formed on the surface of the first substrate, the second substrate and the first substrate bond together through keys, the second substrate is provided with the single-shaft rotation structure and the double-shaft rotation structure, the single-shaft rotation structure and each of the two first electrodes form a capacitor structure, and the double-shaft rotation structure and each of the four second electrodes form a capacitor structure. The first magnetic film structure is formed on the surface of the single-shaft rotation structure and can generate corresponding torque under the action of a magnetic field in a first direction, and the second magnetic film structure is formed on the surface of the double-shaft rotation structure and can generate corresponding torque under the action of a magnetic field in a second direction and a magnetic field in a third direction. The single-chip three-shaft magnetic field sensor has the advantages of being high in sensitivity, small in size, low in power consumption and cost, easy to package and the like.

Description

technical field [0001] The invention relates to the field of sensors, in particular to a single-chip three-axis magnetic field sensor and a preparation method. Background technique [0002] A magnetic field sensor is a type of sensor that is sensitive to a magnetic signal or a signal that can be converted into a magnetic signal. Magnetic field sensors are widely used in various applications such as magnetic navigation, intelligent transportation, smart grid, automotive electronics, and ferromagnetic material detection. The magnetic field itself is a vector field. According to the detection characteristics of the magnetic sensor, the magnetic field sensor can be divided into two categories: scalar magnetic sensor and vector magnetic sensor. Scalar magnetic sensors only detect the magnitude of the magnetic field, not the direction of the magnetic field, such as optical pump magnetometers, which are only suitable for special applications. The vector magnetic sensor can not on...

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Problems solved by technology

The three-axis fluxgate sensor is also packaged through the combination of single-axis sensors. The obtained three-axis fluxgate sensor has a large volume, high packaging accuracy requirements, and high cost, which is limited to high-end applications.

[0010] At present, the research and development of MEMS magnetic sensors are mainly focused on single-axis MEMS magnetic sensors. sensor, the other is a dual-axis MEMS magnetic sensor) and are packaged vertically with each other. The packaging requirements are high, and the volume and packaging cost of the device are also increased.

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