Vibration isolator with characteristics of two-dimensional flexible hinge angle decoupling and magnetic levitation plane drive positioning

Abstract

The invention provides a vibration isolator with characteristics of two-dimensional flexible hinge angle decoupling and magnetic levitation plane drive positioning and belongs to the technical field of precise vibration isolating technologies. A sleeve of a vibration isolator main body and a lower installing plate are born though magnetic levitation action of a magnetic levitation plane motor, a piston barrel and the sleeve are respectively lubricated and supported through air floating faces, and angle motion freedom between an upper installing plate and the lower installing plate is decoupled through a two-dimensional flexible hinge. A motor, a displacement sensor, a limiting switch, a controller and a driver form a position closed loop feedback control system for accurately controlling opposite positions of the upper installing plate and the lower installing plate. The vibration isolator has the three-dimensional approximate zero stiffness, high positional accuracy and angle decoupling characteristics, can have ultra-low inherent frequency and prominent low-frequency / ultra-low-frequency vibration isolating performance, and accordingly and effectively solves the high-performance vibration isolating problem of a precise measuring instrument, a processing device and especially a step scan photo-etching machine.

Description

technical field [0001] The invention belongs to the technical field of precision vibration isolation, and mainly relates to a vibration isolator with two-dimensional flexible hinge angle decoupling and magnetic levitation plane drive positioning. Background technique [0002] With the continuous improvement of ultra-precision machining and measurement accuracy, environmental vibration has become an important factor restricting the improvement of the accuracy and performance of ultra-precision machining equipment and measuring instruments. In particular, the ultra-large-scale integrated circuit processing equipment represented by the step-scan lithography machine is extremely technically intensive and complex, and the key technical indicators have reached the limit of the existing technology, representing the highest level of ultra-precision processing equipment. Precision vibration isolation has become the core key technology in this type of equipment; the line width of the ...

AI Technical Summary

Problems solved by technology

The problems of this method are as follows: 1) Due to the constraints of material properties and structural stiffness, the amplitude of vertical and horizontal stiffness reduction of the vibration isolator is limited; 2) The vertical and horizontal positioning accuracy of the air spring vibration isolator is very poor, It cannot meet the requirements of the photolithography process; 3) To achieve a lower horizontal stiffness requires a larger pendulum length, resulting in excessive height of the vibration isolator, prone to string-film resonance, and poor stability

The problems of this solution are: 1) In the disclosed technical solution, the vibration isolator cannot achieve precise positioning; 2) In the patent EP1803965A2, there is no degree of freedom of angular movement around the horizontal axis between the upper and lower mounting plates. The angular stiffness and natural frequency are very high; patents EP1803970A2 and US20080193061A1 use rubber blocks to provide angular freedom of rotation around the horizontal axis for the upper and lower mounting plates, but due to the high angular stiffness of the rubber blocks, the angular freedom of motion cannot be effectively achieved Degree decoupling, the friction between the decoupling mechanism components of the angular motion freedom introduces additional stiffness, which restricts the vibration isolation performance

However, the proposed technical solution still does not solve the problem of decoupling the precise positioning of the vibration isolator and the angular motion freedom of the upper and lower mounting plates.

Images