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Electrode structure for capacitive touch screens and preparation method thereof

A capacitive touch screen, electrode structure technology, applied in the direction of electrical digital data processing, data processing input/output process, instruments, etc., can solve the problem of poor conductivity or adhesion performance, adhesion, conductivity and corrosion resistance/ Oxidation can not achieve better results at the same time, not corrosion resistance and other problems

Inactive Publication Date: 2013-04-03
无锡力合光电石墨烯应用研发中心有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Although the ITO film produced by the existing process has high conductivity and transparency, which can basically meet the needs of some electronic products for these two technical indicators, there are still many difficulties that are difficult to overcome:
[0006] (1) ITO is very brittle and brittle, so it is easy to be worn during application or cracks and falls off during bending, which affects the service life
[0007] (2) After the ITO film is formed, high temperature treatment is required to achieve high conductivity. When using a plastic substrate, due to the limited processing temperature, the conductivity and transparency of the film are low
[0008] (3) Affected by raw materials, production equipment and processes, ITO thin films will become more and more expensive
[0012] (2) The hue of graphene is completely colorless
However, the electrode layer on the graphene has the problem that the three aspects of adhesion, conductivity and corrosion / oxidation resistance cannot be achieved at the same time.
In order to improve the conductivity of the electrode layer, those skilled in the art choose metals with higher conductivity such as Al and Ag as the electrode layer, but their adhesion to graphene is not good, and the phenomenon that the film layer is easy to fall off and oxidize is easy to occur. and in order to improve the adhesion of the electrode layer, the prior art selects metal layers such as Cu and Ni with good adhesion to graphene prepared by evaporation method as the electrode layer, but its conductivity is very bad, and the film layer is easy to oxidize, so it is not easy to Corrosion resistance; and in order to improve the corrosion resistance / oxidation of the electrode layer, the prior art selects metals such as Mo with better oxidation resistance as the electrode layer. Similarly, the electrical conductivity of the metal with better oxidation resistance or Adhesion performance is very poor
[0017] How to solve these problems in the electrode layer of the graphene-based capacitive touch screen has become a technical bottleneck that limits the application of graphene as a transparent conductive material in touch screen products

Method used

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  • Electrode structure for capacitive touch screens and preparation method thereof
  • Electrode structure for capacitive touch screens and preparation method thereof
  • Electrode structure for capacitive touch screens and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0121] An electrode structure for a capacitive touch screen, the electrode structure sequentially includes a glass substrate, a graphene layer, a NiCu alloy layer, an Al metal layer and a Mo metal layer from bottom to top;

[0122] Wherein, the thickness of the NiCu alloy layer is 30nm; the thickness of the Al metal layer is 140nm; the thickness of the Mo metal layer is 30nm; the thickness of the glass substrate is 2mm; the thickness of the graphene layer is 0.5nm; image 3 It is a schematic structural view of the transparent conductive film layer used in the capacitive touch screen described in Embodiment 1.

[0123] Preparation:

[0124] The preparation method of the electrode structure of the capacitive touch screen:

[0125] (1) Using the method disclosed in CN102220566A to prepare a graphene film, specifically: placing the metal substrate in a vacuum tube furnace, injecting hydrogen into the vacuum chamber while removing oxygen in the vacuum chamber, and raising the temp...

Embodiment 2

[0134] An electrode structure for a capacitive touch screen, the electrode structure sequentially includes a glass substrate, a graphene layer, a NiCu alloy layer, an Al metal layer and a Mo metal layer from bottom to top;

[0135] Wherein, the thickness of the NiCu alloy layer is 150nm; the thickness of the Al metal layer is 700nm; the thickness of the Mo metal layer is 150nm; the thickness of the glass substrate is 0.3mm; the thickness of the graphene layer is 3nm.

[0136] Preparation:

[0137] The preparation method of the electrode structure of the capacitive touch screen:

[0138] (1) Using the method disclosed in CN102220566A to prepare a graphene film, specifically: placing the metal substrate in a vacuum tube furnace, injecting hydrogen into the vacuum chamber while removing oxygen in the vacuum chamber, and raising the temperature to 1000°C, Then methane gas is injected into the vacuum chamber to obtain a metal substrate deposited with graphene; the number of atomic...

Embodiment 3

[0147] An electrode structure for a capacitive touch screen, the electrode structure sequentially includes a PET substrate, a graphene layer, a NiCu alloy layer, an Al metal layer and a Mo metal layer from bottom to top;

[0148] Wherein, the thickness of the NiCu alloy layer is 120nm; the thickness of the Al metal layer is 500nm; the thickness of the Mo metal layer is 180nm; the thickness of the PET substrate is 1.6mm; the thickness of the graphene layer is 2nm.

[0149] Preparation:

[0150] The preparation method is the same as in Example 1, except that the process conditions for the magnetron sputtering deposition coating of the NiCu alloy layer in step (3) are: vacuum degree 0.4Pa, voltage 450V, target material is NiCu alloy, and working gas is argon The process conditions of the magnetron sputtering deposition coating of the Al metal layer are: vacuum degree 0.4Pa, voltage 320V, the material of the target is metal Al, and the working gas is argon; the process conditions ...

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Abstract

The invention relates to an electrode structure for capacitive touch screens. The electrode structure comprises a substrate, a graphene layer and a conductive metal film layer sequentially from bottom to top, wherein a metal adhesive layer which enhances the adhesion between the graphene layer and the metal film layer is arranged between the conductive metal film layer and the graphene layer. The electrode structure disclosed by the invention has the characteristics of high adhesion, corrosion resistance and good electrical conductivity, moreover, the process of a production method is simple, and the product yield is high.

Description

technical field [0001] The invention relates to an electrode structure for a capacitive touch screen and a preparation method thereof, in particular to a graphene-based capacitive touch screen electrode structure composed of multilayer metal and a preparation method thereof, belonging to the application field of graphene materials and capacitors Type touch screen preparation field. Background technique [0002] The touch screen is an input device that can facilitate the interaction between people and computers and other portable mobile devices. In recent years, capacitive touch screens based on indium tin oxide (ITO) transparent conductive films have been widely used in mobile Internet devices, such as smartphones and portable tablet computers. [0003] The currently popular capacitive touch screen structure includes (glass) substrate 100, transparent conductive electrode layer 101, edge electrode lead layer 102 and other components ( figure 1 It is a structural schematic ...

Claims

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Application Information

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IPC IPC(8): G06F3/044
Inventor 刘志斌黄海东陈凯吴勇赵斌
Owner 无锡力合光电石墨烯应用研发中心有限公司
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