Two-degree-of-freedom nanometer positioning platform
A nano-positioning and degree-of-freedom technology, applied in optics, opto-mechanical equipment, instruments, etc., can solve problems such as uneven distribution of imprinting force, limitation of processing accuracy and quality, easy stretching and deformation of silica gel, etc., to achieve micro-feeding and Precise positioning, non-linearity elimination, assembly-free effects
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[0020]In order to further understand the invention content, characteristics and effects of the present invention, the following examples are given, and detailed descriptions are as follows in conjunction with the accompanying drawings:
[0021] see Figure 1 ~ Figure 3 , a two-degree-of-freedom nanopositioning platform, including a moving platform 2 and a base 1, the moving platform 2 and the base 1 are connected by a flexible branch chain in the X-axis direction and a flexible branch chain in the Y-axis direction.
[0022] The X-axis flexible branch chain includes a piezoelectric ceramic driver 3 arranged parallel to the X-axis direction, a displacement amplification lever 6 arranged parallel to the Y-axis direction, a first moving block 8 and a second moving block 12 .
[0023] The piezoelectric ceramic driver 3 arranged parallel to the X-axis direction is placed horizontally, and a ball joint 4 is installed on the top, through which the bottom of the displacement amplificat...
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