Giant magneto-impedance effect biosensor preparation method for serum tumor marker detection

A tumor marker and biosensor technology, applied in the field of giant magneto-impedance effect biosensor fabrication, can solve the problems of not realizing cell sample labeling and typing detection, low sensitivity of individual indicators, lack of flexibility, etc., to achieve real-time analysis , no storage requirements, the effect of high detection sensitivity

Active Publication Date: 2013-02-20
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the shortcomings of these methods are the lack of flexibility, low sensitivity and poor specificity of single indicators.
In 2007, Kurlyandskaya et al. (A.Kumar, S.Mohapatra, V.F.Miyar, A.Cerdeira, J.A.Garcia, H.Srikanth, J.Gass and G.V.Kurlyandskaya) published in "Appl.Phys.Lett." (American Applied Physics Letters) "Vol.91, pp.143902, 2007" reported the use of GMI sensors to phagocytose Fe 3 o 4 The detection of human embryonic kidney cells (HEK 293) with nanoparticles proved the feasibility of the GMI effect in the field of biomedical detection, but this research work only obtained the GMI sensor’s detection of Fe 3 o 4 Response to magnetic nanoparticles, no labeling and typing detection of cell samples
Through literature and patent searches, no relevant research results were found on the use of GMI effect sensors for the detection of serum tumor markers

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] The whole preparation process is divided into the following steps:

[0051] (1) The giant magneto-impedance effect sensor (referred to as GMI sensor) is composed of NiFe / Cu / NiFe multilayer film on a glass substrate. The shape is a zigzag structure with 3 turns and a distance of 60um between turns. The width of the Cu film is smaller than that of the NiFe film. The NiFe film has a width of 160 um and a thickness of 6 um, and the Cu film has a width of 140 um and a thickness of 6 um. The GMI sensor is produced by MEMS technology, and the specific production can be realized by using the existing technology, such as the method described in the patent No. ZL200510026607.8, which will not be repeated here.

[0052] (2) An insulating layer of Al2O3 is made by sputtering on the GMI sensor with a thickness of 0.5um. Throw away the photoresist, dry, expose, develop, etch Al2O3, and remove the glue, so that the sensor pins are exposed to the outside.

[0053] (3) A Cr / Au thin fi...

Embodiment 2

[0071] (1) The giant magneto-impedance effect sensor of the present invention is composed of a NiFe / Cu / NiFe multilayer film on a glass substrate, and its shape is a zigzag structure with 5 turns and a distance between turns of 60um. The width of the Cu film is smaller than that of the NiFe film, the NiFe film has a width of 140um and a thickness of 4um, and the Cu film has a width of 120um and a thickness of 4um. The GMI sensor is manufactured by MEMS technology. The detailed description of the manufacture can refer to the patent that has been applied for. The patent number is 200510026607.8, and will not be repeated here.

[0072] (2) Sputtering is used to make an insulating layer of aluminum oxide on the GMI sensor, and its thickness is 0.7um. Throw away the photoresist, dry, expose, develop, etch Al2O3, and remove the glue, so that the sensor pins are exposed to the outside.

[0073] (3) A Cr / Au thin film is sputtered to a thickness of 500 nm. Throw photoresist, dry, expo...

Embodiment 3

[0091] (1) The giant magneto-impedance effect sensor of the present invention is composed of a NiFe / Cu / NiFe multilayer film on a glass substrate, and its shape is a zigzag structure with 10 turns and a distance between turns of 60um. The width of the Cu film is smaller than that of the NiFe film, the NiFe film has a width of 120um and a thickness of 2um, and the Cu film has a width of 100um and a thickness of 2um. The GMI sensor is manufactured by MEMS technology. The detailed description of the manufacture can refer to the patent that has been applied for. The patent number is 200510026607.8, and will not be repeated here.

[0092] (2) Sputtering is used to make an insulating layer of aluminum oxide on the GMI sensor, and its thickness is 1um. Throw away the photoresist, dry, expose, develop, etch Al2O3, and remove the glue, so that the sensor pins are exposed to the outside.

[0093] (3) A Cr / Au thin film is sputtered to a thickness of 100 nm. Throw photoresist, dry, expos...

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Abstract

The present invention provides a giant magneto-impedance effect biosensor preparation method for serum tumor marker detection. The method comprises the following steps: (1) adopting a MEMS process to prepare a giant magneto-impedance effect sensor; (2) preparing an aluminum oxide insulation layer on the giant magneto-impedance effect sensor, and carrying out spin photoresist coating, exposuring, developing, aluminum oxide etching, and photoresist removing, such that the sensor pin is exposed; (3) carrying out Cr / Au film sputtering, and carrying out spin photoresist coating, exposuring, developing, Cr / Au film etching, and photoresist removing, such that the Au film on the sensor pin and the sensor sensitive part is exposed; (4) preparing a biologically sensitive film on the Au film; (5) immobilizing tumor marker monoclonal antibody; (6) carrying out antigen spotting; (7) immobilizing biotinylated antibody; and (8) immobilizing a magnetic tag. According to the present invention, the GMI effect sensor is applied in serum tumor marker detection, the detection is rapid, mass production is easily achieved, and the existing clinical application requirements can be met.

Description

technical field [0001] The invention relates to the technical fields of medical detection methods and magnetic sensing, in particular to a manufacturing method of a giant magneto-impedance effect biosensor for detecting serum tumor markers. Background technique [0002] Malignant tumors are one of the major diseases that threaten human health and life today, and the incidence rate is increasing year by year. At present, the main clinical tumor detection methods include: [0003] [1] Laboratory examination: mainly includes routine examination of blood, urine, and stool, biochemical and immune examination, pathological examination, etc. [0004] [2] Radiological examination: mainly including X-ray fluoroscopy, X-ray film, X-ray contrast examination, CT scan, nuclear magnetic resonance imaging, etc. [0005] [3] Radionuclide inspection: that is, isotope inspection, including functional measurement inspection, scanning and gamma irradiation inspection, radioimmunoassay, etc. ...

Claims

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Application Information

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IPC IPC(8): G01N33/577G01N33/531B81C1/00
Inventor 周勇王韬陈翔雷冲
Owner SHANGHAI JIAO TONG UNIV
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