Test analysis method for manufactured super-diffraction directional transmission material structure
A technology of directional transmission and material structure, which is applied in the field of testing and analysis after the preparation of super-diffractive directional transmission material structures, can solve the problems of difficult operation, large interference, and inability to reveal the super-diffractive optical properties of materials, and achieves simple testing and analysis methods and external little interference effect
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[0026] Embodiment 1, utilize the present invention to realize Ag / SiO 2 Structural preparation and test analysis of superdiffraction material with directional transmission angle of 70.2°.
[0027] (1) Choose double-sided finely polished quartz glass with a diameter of 25.4mm as the transparent substrate, and use nanofabrication on this transparent substrate to obtain a single-slit structure Cr mask with a slit width of 80nm, and the thickness of the Cr mask is 40nm;
[0028] (2) The planarization of the nano-single-slit mask was realized by spin-coating PMMA, and the thickness of the PMMA planarization layer was controlled at 20nm by reactive ion etching, the etching power was 5W, and the etching gas was O 2 , the etching gas flow rate is 10SCCM;
[0029] (3) Then deposit Ag / SiO on the planarized nano single-slit mask by surface electron beam evaporation deposition method 2 Super-diffraction multi-layer film material, the number of Ag layers is 8 layers, SiO 2 The number of ...
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