Low temperature sintering piezoelectric ceramic material and preparation method thereof

Abstract

The invention discloses a low temperature sintering piezoelectric ceramic material, wherein composition of the material is represented by a chemical general formula Pb(0.995-a-b-3c / 2)BaaSrbFec(Zn1 / 3Nb2 / 3)xZryTi(1-x-y)O3+u%Li2CO3+v%M2O3+w%ZnO, M is a trivalent metal element, a molar ratio of Ba to Sr to Fe to (Zn1 / 3Nb2 / 3) to Zr is a:b:c:x:y, a is more than or equal to 0 and is less than or equal to 0.05, b is more than or equal to 0 and is less than or equal to 0.03, c is more than or equal to 0 and is less than or equal to 0.01, x is more than or equal to 0.25 and is less than or equal to 0.35, y is more than or equal to 0.30 and is less than or equal to 0.40, the Pb(0.995-a-b-3c / 2)BaaSrbFec(Zn1 / 3Nb2 / 3)xZryTi(1-x-y)O3 is adopted as matrix ceramic powder, u% represents a weight percentage of Li2CO3 in the matrix ceramic powder, v% represents a weight percentage of M2O3 in the matrix ceramic powder, w% represents a weight percentage of ZnO in the matrix ceramic powder, u is more than 0 and is less than or equal to 1, v is more than 0 and is less than or equal to 2, and w is more than 0 and is less than or equal to 0.2. According to the present invention, an oxide dopant is added and combined, such that a sintering temperature of the ceramic can be reduced to a temperature of 900 DEG C from a temperature of 1200 DEG C, a high piezoelectric constant (d33 is more than or equal to 450 pC / N ), a high electromechanical coupling coefficient (KP is more than or equal to 0.60), a high Curie point (Tc is more than 350 DEG C) and a moderate dielectric constant (epsilonr is 2000-3500) can be obtained, and application requirements on the ceramic material by the laminated piezoelectric driver are met.

Description

technical field [0001] The invention belongs to the field of novel inorganic non-metallic materials, and more specifically relates to a low-temperature sintered piezoelectric ceramic material and a preparation method thereof. Background technique [0002] Piezoelectric ceramic micro-actuators are solid-state actuators manufactured using the inverse piezoelectric effect, and are widely used in high-tech fields such as precision optics, micro-mechanics, and micro-electronics technology. These applications require piezoelectric ceramic devices to develop in the direction of small size, low driving voltage, large displacement, and integration. As the core material of the driver, piezoelectric ceramic materials are required to have the characteristics of high sensitivity, large static output torque, and good temperature stability. The specific requirements for the performance of piezoelectric driving materials are: high piezoelectric constant to achieve low voltage driving and L...

AI Technical Summary

Problems solved by technology

[0006] Aiming at the defects of the prior art, the object of the present invention is to provide a low-temperature sintered piezoelectric ceramic material, which aims to solve the problem that the lead in the material in the sintering process is extremely volatile and pollutes the environment due to the high sintering temperature of the existing piezoelectric ceramics. Deterioration of piezoelectric performance and poor repeatability

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