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Coating film inspection apparatus and inspection method

A technology of inspection device and inspection method, which is applied to measurement devices, optical devices, instruments, etc., can solve the problems of uneven color, difficulty in inspection, inability to grasp the uniformity of sheets, etc., to prevent measurement errors and achieve good efficiency.

Inactive Publication Date: 2012-11-07
AISIN SEIKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, minute color unevenness is also averaged, making accurate inspection difficult
[0024] In addition, the conventional inspection method measures the amount of reflected light at different measurement points on the metal coating, and grasps the relative difference in the measured values ​​as color unevenness, which cannot grasp the uniformity of the orientation of the flakes.
In addition, Patent Document 5 uses a microscope to photograph the flakes, but the photographing is only done on the metal-coated surface, and the orientation of the flakes cannot be detected.

Method used

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  • Coating film inspection apparatus and inspection method
  • Coating film inspection apparatus and inspection method
  • Coating film inspection apparatus and inspection method

Examples

Experimental program
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Effect test

no. 1 approach ］

[0081] (the whole frame)

[0082] figure 1 It is a schematic structural diagram of the inspection apparatus of the coating film which concerns on 1st Embodiment of this invention.

[0083] The inspection device 1 has an optical device 2 for detecting reflected waves while irradiating a sample 3 with terahertz waves, a lock-in amplifier 4 for synchronously amplifying a detection signal of the reflected waves, and a control device 5 for controlling the inspection device. The optical device 2 has a laser 10 , a demultiplexer 11 , a modulator 12 , a terahertz wave generator 15 , a terahertz detector 22 , and an optical delay unit 25 .

[0084] The laser light excited by the laser 10 is divided into a fundamental wave and a second harmonic by a wave splitter 11 . The fundamental wave is modulated into a pulse of a predetermined frequency by the modulator 12 and is incident on the terahertz wave generator 15 . The terahertz wave generated from the terahertz wave generator 15 is i...

no. 2 approach ］

[0179] Next, an inspection device according to a second embodiment of the present invention will be described. The inspection device of the present embodiment is a modified example of the first embodiment, and can measure the film thickness of the metal coating. The configuration of the inspection device of this embodiment is substantially the same as that of the first embodiment except for the peak detection process (step S56 ), so only the different configurations will be described.

[0180] Figure 22 It is a cross-sectional view of a metal coating sample. As shown in this figure, metallic coating is formed by sequentially forming a metallic coating layer and a clear coating layer on a base metal. When the coating sample is irradiated with terahertz waves, the terahertz waves are reflected at the interface where the refractive index changes. That is, the terahertz wave is reflected at the interface (1) between the air and the clear coat, the interface (2) between the cle...

no. 3 approach ］

[0197] Figure 26 , Figure 27 It is a figure for demonstrating the inspection apparatus of 3rd Embodiment of this invention. According to the inspection measures of the above-mentioned first embodiment, such as Figure 26 As shown, even in the case where there are grooves in the sample 3, the terahertz wave reaches the terahertz wave detector 22 without being scattered. Therefore, the film thickness of the bottom a of the groove can be obtained by measuring the delay of the reflected wave. However, the film thickness on the wall portions b, c not irradiated with terahertz waves cannot be measured. In the piston cylinder, the accuracy of the internal coating has a great influence on the performance of the engine, so the necessity of measuring the wall portion is high.

[0198] The inspection device of this embodiment is based on the inspection device of the first embodiment, and further includes a reflector 301 ( Figure 27 ). The reflector 301 may be a prism or the like...

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Abstract

A coating film inspection apparatus is provided with a terahertz wave generator which generates a terahertz wave, an irradiation optical system which irradiates a sample on which a film is formed with the terahertz wave, a terahertz wave detector which detects the terahertz wave reflected by the sample, and a control unit which represents the electric field intensity of the detected terahertz wave as time-axis waveform data, detects a plurality of peaks from the waveform data, and calculates the film thickness on the basis of the time difference between the peaks.

Description

technical field [0001] The present invention relates to a coating film inspection device and method for measuring coating film thickness and uneven coating quality. Background technique [0002] In industrial products such as automobiles, various coatings are applied to substrates (substrates), and inspection devices that non-destructively inspect painted films are used. The coating film inspection device can non-destructively inspect the film thickness, gloss, etc. of the coating by using laser light, ultrasonic waves, X-rays, and the like. [0003] As an inspection device for film thickness, for example, Patent Document 1 (Japanese Patent No. 3214190 ) is known. This inspection device can measure the film thickness using the difference between the distance to the surface of the coating film measured by the optical sensor and the distance to the conductor measured by the eddy current sensor by using the optical sensor and the eddy current sensor. [0004] In addition, the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/35G01N21/88G01B11/06G01N21/3563G01N21/3586G01N21/95
CPCG01N2021/8427G01B11/0633G01N21/8422G01N21/3581
Inventor 大竹秀幸上原让高柳顺
Owner AISIN SEIKI KK
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