Method and device of laser impact fine tuning

A laser shock and laser technology, applied in the field of fine-tuning of micro-mechanical cantilever beams, laser shock fine-tuning method and device, and fine-tuning of metal surface curvature, can solve the problem of difficult control of contact mechanical fine-tuning accuracy and large temperature effect , Difficult to fine-tune, etc.

Inactive Publication Date: 2015-06-24
JIANGSU UNIV
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  • Summary
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  • Claims
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Problems solved by technology

[0005] The purpose of the present invention is to solve the problem that the existing laser thermal adjustment has a large temperature effect, the amount of deformation is difficult to control, it is difficult to realize fine adjustment, and the problem of contact mechanical fine adjustment is difficult to control, and to invent a non-contact laser adjustment method. Induced shock wave, method and device for fine-tuning the bending of the target

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  • Method and device of laser impact fine tuning
  • Method and device of laser impact fine tuning
  • Method and device of laser impact fine tuning

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Experimental program
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Effect test

Embodiment 1

[0026] Such as Figure 1-3 shown.

[0027] A laser shock fine-tuning method, it comprises the following steps:

[0028] First, polish the cantilever-shaped target to ensure the smoothness and flatness of the target surface, and clean the target surface with anhydrous alcohol to ensure the cleanliness of the target;

[0029] Secondly, apply black paint on the surface of the target to form an opaque layer coating to ensure the absorption rate of the target to the laser; control the thickness of the black paint coating to 10-30 microns, see figure 2 ;

[0030] Third, put the target material coated with black paint into the water as the constraining layer, and use water as the constraining layer to cover the surface of the black paint; control the water depth to be 1-2 mm above the black paint layer, see figure 2 ;

[0031] Fourth, fasten one end of the target with a fixture, and the other end is cantilevered to ensure the position, turn on the nanosecond pulse laser, ad...

Embodiment 2

[0035] Such as Figure 1-3 shown.

[0036] A laser shock fine-tuning calibration device, which consists of a laser drive control system, a target system and a target clamping displacement system, such as figure 1 As shown, the laser drive control system consists of a computer 12, a laser controller 10, a nanosecond laser 9, a plane mirror 8 and a focusing lens 7. The computer 12 controls the laser controller 10, and the laser controller 10 controls the nanosecond laser 9. The laser beam is reflected to the focusing lens 7 after being reflected by the plane mirror 8 and then directly enters the target system; the target system is composed of a water layer 6, a black paint layer 5 and a target material 4, and the water layer is used as a constraining layer to cover the surface coated with black paint. The upper surface of the target layer, such as figure 2 ; The entire target system is clamped on the target clamping displacement system; the target clamping displacement system...

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Abstract

A method and a device of laser impact fine tuning are characterized in that a cantilever-shaped target material sample is polished to guarantee smoothness and evenness of the surface of a target material and guarantee the target material to be clean, black paint is painted on the surface of the target material to guarantee absorption rate of the target material on laser, and water serves as a restraint layer to be cover on the black paint surface. The target material is fastened through a clamp to guarantee positions. A nanosecond pulsed laser is opened, a light path is adjusted to enable output laser of the nanosecond pulsed laser to focus on the surface of the target material through a plane mirror and a focusing lens, a single time or repeated emission operation is conducted on the nanosecond pulsed laser, the target material generates micro bending deformation under a single time or repeated laser impact, energy of the laser is adjusted to control deformation degree of the target material, and fine tuning of bending curvature of the target material is achieved accordingly. The method and the device produce high pressure stress and strain rate of the target material, can achieve fine tuning of the bending curvature of the target material, can improve performance of the target material and enable the target material to resist big bending moment.

Description

technical field [0001] The present invention relates to a micro-electromechanical system (MEMs) adjustment technology and laser micro-forming technology, especially a fine-tuning method suitable for metal surface curvature curvature, such as a micro-mechanical cantilever beam fine-tuning method and its device, specifically The invention relates to a laser shock micro-adjustment method and device. Background technique [0002] At present, with the development of modern science and technology, the trend of miniaturization of products is accelerating, and the demand for micro and small parts is also increasing, especially the rapid development of the field of micro-electromechanical systems (MEMS). In these industries and fields, micromechanical cantilever plays an important role. Cantilevers are widely used as extremely sensitive physical, chemical and biological sensors. However, in order to obtain higher sensitivity, the micromechanical cantilever applied to the sensor...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B21D5/00
Inventor 沈宗宝顾春兴刘会霞王霄李品张强陆萌萌袁耀强黄创
Owner JIANGSU UNIV
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