Flexible compound type array sensor used for artificial sensitive skin of intelligent robot
An intelligent robot and array sensor technology, applied in the field of sensing, can solve the problems of non-flexibility and no simultaneous detection of flexible sensor arrays, and achieve the effects of improving accuracy, stabilizing the structure of interdigitated electrodes, and reducing cross-interference
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[0015] see figure 1 , figure 2 In this embodiment, the structural form of the flexible composite array sensor used for the artificial sensitive skin of the intelligent robot is: the sensing unit constituting the array is based on a flexible polyimide circuit board, and pressure sensors are respectively arranged on the same surface of the base. 1. The temperature sensor 2 and the humidity sensor 3; the surface height of the pressure sensor is higher than that of the temperature sensor and the humidity sensor, forming an overall concave-convex distribution form (such as figure 2 shown).
[0016] The specific implementation is that under normal temperature and pressure, the pressure-sensitive material is prepared into a small piece with a thickness of about 2mm, and the temperature-sensitive material and the humidity-sensitive material are prepared into thin films by spin coating. The thickness of the film of the temperature sensitive material and the humidity sensitive mater...
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