MEMS (Micro-Electro-Mechanical Systems) processing technique-based cylindrical capacitive sensor

Abstract

The invention discloses an MEMS processing technique-based cylindrical capacitive sensor. The MEMS processing technique-based cylindrical capacitive sensor comprises a rotary spindle electrode and a cylindrical fixed electrode coaxially mounted on the outside of the rotary spindle electrode; in the rotary spindle electrode, a first insulating layer, a copper spindle electrode and a second insulating layer outwardly and sequentially wrap the outer cylindrical surface of a spindle; and in the cylindrical fixed electrode, a third insulating layer, an equipotential protective ring, a fourth insulating layer and four arc-shaped electrodes equidistantly embedded in the inner circle of the fourth insulating layer are inwardly and sequentially wrapped in the cylindrical hole of an electrode base. The MEMS processing technique can be adopted to process the electrodes to be ultrathin, the complex processing and assembly process of the main conventional method in producing the cylindrical capacitive sensor can be overcome, the size of the sensor is reduced, moreover, the edge effect of the sensor can be inhibited as well, and the cylindrical capacitive sensor is suitable for monitoring the rotation error of the spindle. Due to the technique, the miniaturized cylindrical capacitive sensor can be easily produced, and the sensor can also be easily produced in batches.

Description

technical field [0001] The invention relates to a capacitive sensor, in particular to a cylindrical capacitive sensor based on MEMS processing technology. Background technique [0002] Since the 1960s, with the development of emerging science and technology such as atomic energy, aerospace technology, microelectronics, information technology IC manufacturing and bioengineering, the industry has put forward more stringent requirements for machining accuracy, from micron to submicron , has now developed to the nanometer level, and is gradually moving towards the level of ultra-precision machining with sub-nanometer precision. [0003] Precision machine tools are the hardware conditions for ultra-precision machining, and high-precision spindles are the core components of precision machine tools, such as nano-diamond lathes and precision machining centers. At the same time, high-precision spindles are also hard disk drives, high-precision rotating motors, and large turbogenerato...

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Problems solved by technology

[0004] Suzhou Guangdong Precision Instrument Co., Ltd. installs a standard ball on the spindle and uses a laser interferometer to detect the rotation error of the standard ball to indirectly measure the rotation error of the spindle, but the structure of the system is relatively complicated.

Wang Kai of Xi'an University of Technology proposed a method of using laser light to irradiate a concave mirror installed on the end surface of the measured shaft, and using a photodiode to detect the position of the reflected light to detect the rotation error of the main shaft with two degrees of freedom. However, this method has high requirements for the measurement environment. Difficult to adjust the light path

Korean scholar Hyeong-Joon Ahn proposed a cylindrical capacitive displacement sensor for radial displacement measurement, but the conventional processing method is used to manufacture it, and the electrode thickness of the obtained capacitive sensor is at the millimeter level, resulting in large gaps in the application process of the sensor. edge effects, and difficult to overcome

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