Miniature spectrograph with diffraction hole array structure and high resolution spectrum reconstruction method thereof
A high-resolution spectrum and miniature spectrometer technology, which is applied in the field of miniature spectrum measurement devices, can solve the problems of narrow wavelength measurement range, large spectrometer volume, and low resolution, and achieve wide spectrum measurement range, high resolution, and portability. Effect
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[0027] figure 1It is a diffraction hole array structure adopted in the present invention. The diffraction hole array miniature spectrometer includes a two-dimensional array of diffraction holes 1 built in the light-blocking layer 2 on the surface of the substrate 3, and the diffraction holes 1 in each diffraction structure unit have different apertures in the light-blocking layer 2, and the aperture size is the same as the wavelength of the incident light. Close, the depth of each diffraction hole 1 is the same and is equal to the thickness of the light blocking layer 2; the interval between each diffraction hole 1 in the two-dimensional array of diffraction holes is about 10 μm or more; the detection array chip 4 is arranged under the substrate 3, and each A pixel element in the detection array chip 4 is correspondingly set directly below the diffraction hole 1; if each pixel element has a large area, in order to improve the sensitivity of the device, a shading plate 5 is pr...
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