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Miniature spectrograph with diffraction hole array structure and high resolution spectrum reconstruction method thereof

A high-resolution spectrum and miniature spectrometer technology, which is applied in the field of miniature spectrum measurement devices, can solve the problems of narrow wavelength measurement range, large spectrometer volume, and low resolution, and achieve wide spectrum measurement range, high resolution, and portability. Effect

Inactive Publication Date: 2012-07-11
NANJING FANGYUAN GLOBAL DISPLAY TECH
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Problems solved by technology

[0007]Technical problem: the object of the present invention is to provide a micro-spectrometer with a diffraction hole array structure and its high-resolution spectral restoration method, which solves the problem of In the background technology, spectrometers have technical problems such as large volume, high cost, difficult manufacture, sensitivity to vibration, low resolution, narrow wavelength measurement range, etc.

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  • Miniature spectrograph with diffraction hole array structure and high resolution spectrum reconstruction method thereof
  • Miniature spectrograph with diffraction hole array structure and high resolution spectrum reconstruction method thereof
  • Miniature spectrograph with diffraction hole array structure and high resolution spectrum reconstruction method thereof

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Embodiment Construction

[0027] figure 1It is a diffraction hole array structure adopted in the present invention. The diffraction hole array miniature spectrometer includes a two-dimensional array of diffraction holes 1 built in the light-blocking layer 2 on the surface of the substrate 3, and the diffraction holes 1 in each diffraction structure unit have different apertures in the light-blocking layer 2, and the aperture size is the same as the wavelength of the incident light. Close, the depth of each diffraction hole 1 is the same and is equal to the thickness of the light blocking layer 2; the interval between each diffraction hole 1 in the two-dimensional array of diffraction holes is about 10 μm or more; the detection array chip 4 is arranged under the substrate 3, and each A pixel element in the detection array chip 4 is correspondingly set directly below the diffraction hole 1; if each pixel element has a large area, in order to improve the sensitivity of the device, a shading plate 5 is pr...

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Abstract

The invention provides a miniature spectrometer with a diffraction hole array structure and a high resolution spectrum reconstruction method thereof. The diffraction hole array structure miniature spectrometer basically comprises a miniature diffraction hole two-dimensional array, a base, a detecting array chip, a glare shield, and light transmitting holes, wherein the miniature diffraction hole two-dimensional array is constructed on a light blocking layer on the base surface and different in hole size. The base is made of transparent materials. The detecting array chip which corresponds to the base is arranged below the base, and one diffraction hole corresponds to one pixel member of the detecting array chip. The glare shield is arranged between the base and the detecting array chip and covers most area of each charge coupled device (CCD) pixel member. A series of light transmitting holes with the same hole size are arranged on the glare shield, each diffraction hole directly aligns to each light transmitting hole, and each CCD pixel member is below each diffraction hole. Due to the fact that diffraction phenomena occurs after incident light passes through the diffraction holesabove the base, the corresponding CCD pixel members below the diffraction holes can detect a certain diffraction light power. The hole size of each diffraction hole on the array is different, the diffraction light power detected by the corresponding CCD pixel members below is also different, and the spectral information of the incident light can be obtained only by inverting the data detected by each CCD pixel member.

Description

technical field [0001] The invention relates to a portable real-time detection miniature spectrum measurement device and a high-resolution spectrum recovery method thereof. Background technique [0002] A spectrometer is an important optical instrument. It is a basic device that combines optical methods with modern electronic data processing systems to accurately analyze the structure, composition and content of substances by obtaining spectral information of the substances under study. With the development of the spectrometer, its application range is wider and wider, covering many fields, such as astronomical observation, aerospace, biomedicine, petrochemical industry, agriculture, metallurgy, geological exploration, ecological environment and national defense and military affairs. Because of its important application value, spectrometer has attracted more and more people's attention, and it has become an important part of modern scientific instruments. [0003] However,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J3/02G01J3/18G01J3/28
Inventor 何浩培杨涛李伟黄维梁忠诚
Owner NANJING FANGYUAN GLOBAL DISPLAY TECH
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