touch panel sensor
A touch panel and sensor technology, applied in the direction of instruments, electrical digital data processing, input/output process of data processing, etc., can solve problems such as inability to ensure electrical conductivity, and achieve high reliability and excellent durability
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[0033] An alkali-free glass plate (thickness 0.7 mm, diameter 4 inches) is set as a substrate, and on its surface, the types and contents of the rare earth elements shown in the following Table 1 are formed by DC magnetron sputtering (the unit is atom %, balance: Al and unavoidable impurities) different Al alloy films (film thicknesses are all about 500nrn). Before film formation, the atmosphere in the chamber is temporarily set to reach the vacuum degree: 3×10 -6 After Torr, the film-forming temperature and the Ar gas pressure were varied as shown in Table 1 using a disc-shaped target with a diameter of 4 inches having the same composition as that of each Al alloy film. Other sputtering conditions are as follows. Next, the Al alloy after film formation was heat-treated for 30 minutes at various annealing temperatures described in Table 1 in a nitrogen atmosphere. In Table 1, "-" means no heating (ie, room temperature). In addition, the composition of the formed Al alloy fi...
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