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Temperature compensation method of SAW (surface acoustic wave) high-temperature pressure sensor based on vertical-horizontal stress adjustment

A pressure sensor and stress adjustment technology, applied in the field of temperature compensation, can solve problems such as inappropriate

Inactive Publication Date: 2012-05-02
SHANGHAI JIAO TONG UNIV
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Problems solved by technology

It can be seen that this method is only suitable for situations where temperature changes and measured changes do not occur at the same time, but in actual pressure sensor applications, temperature and pressure changes often occur at the same time, so this method is not suitable

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  • Temperature compensation method of SAW (surface acoustic wave) high-temperature pressure sensor based on vertical-horizontal stress adjustment
  • Temperature compensation method of SAW (surface acoustic wave) high-temperature pressure sensor based on vertical-horizontal stress adjustment
  • Temperature compensation method of SAW (surface acoustic wave) high-temperature pressure sensor based on vertical-horizontal stress adjustment

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Embodiment Construction

[0038] The embodiments of the present invention are described in detail below in conjunction with the accompanying drawings: this embodiment is implemented on the premise of the technical solution of the present invention, and a feasible implementation mode and specific operation process are provided, but the protection scope of the present invention does not Limited to the following examples.

[0039] With the emerging piezoelectric crystal LGS (lanthanum gallium silicate, Langsite (La 3 Ga 5 SiO 14 )) is the sensor substrate material, according to the characteristics of piezoelectric crystal anisotropy, using the method of solving the Christofel equation in the piezoelectric medium, solve the wave velocity, electromechanical coupling coefficient, energy flow angle, anisotropic Surface wave parameters such as anisotropy factor and effective dielectric constant, and then use disturbance theory combined with boundary conditions to calculate frequency temperature coefficient, ...

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Abstract

The invention relates to a temperature compensation method of an SAW (surface acoustic wave) high-temperature pressure sensor based on vertical-horizontal stress adjustment. The method is characterized in that: based on the optimal selection of SAW sensitive substrate cut, the traditional planar membrane structure is optimized and designed into a structure that the back surface is an inner cylindrical surface. In the invention, by reasonably designing the geometric dimensions of the membrane such as diameter, thickness, radius of the cylindrical surface and the like, the distribution state of the aspect ratio of the surface stress is controlled, and the frequency-temperature characteristic of an SAW resonator on the surface of the membrane is changed, so that the frequency-temperature characteristic of an SAW device is basically kept constant within a relatively wide range of temperature and pressure and a better temperature compensation effect in a scope of wide temperature and wide range is realized.

Description

technical field [0001] The invention relates to a method for temperature compensation of a surface acoustic wave (SAW) high temperature pressure sensor. Specifically, on the basis of optimizing the cut shape of the SAW sensitive substrate, the frequency-temperature characteristics of the SAW resonator are improved by controlling the aspect ratio of the substrate surface, so as to achieve a better temperature compensation effect over a wider temperature and range. . Background technique [0002] The detection of parameters such as temperature and pressure in high-temperature environments is an important task in the fields of petroleum, chemical industry, automobiles, aerospace, military and other fields. Due to the difficulties in power supply and wire connection in high-temperature environments, it is also difficult for general electronic circuits to work normally. The use of conventional sensors are greatly restricted. Therefore, it is very meaningful to study pressure se...

Claims

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Application Information

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IPC IPC(8): G01L19/04
Inventor 吉小军任姝范彦平韩韬蔡萍
Owner SHANGHAI JIAO TONG UNIV
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