Flexible Roberts mechanism based force sensor realizing two-stage force resolutions

Abstract

The invention discloses a flexible Roberts mechanism based force sensor realizing two-stage force resolutions. The force sensor comprises a sensitive body, a support, a displacement detecting part, an eddy current displacement sensor and a probe, wherein the eddy current displacement sensor is installed on the support by way of clasping; the support is fixed on the sensitive body by bolts; the displacement detecting part is fixed on a first platform of the sensitive body by bolts; and one end of the probe passes through via holes on a front board of the sensitive body and then is installed ina threaded hole of the first platform. The force sensor has the following advantages: two groups of flexible Roberts linear motion mechanisms are machined on the sensitive body by adopting wire cut electrical discharging machining and are symmetrically arranged, thus ensuring high-precision linear motion of the motion platform, namely reducing the parasitic error of the mechanisms; and meanwhile,as a sensitive structure of the force sensor, the sensitive body is a part and dispenses with assembly, thus effectively avoiding such problems caused by assembly in the traditional force sensors as friction, gaps and the like. The sensor can effectively realize two-stage force resolutions which can not be realized by the traditional force sensors.

Description

technical field [0001] The invention relates to a force sensor, more particularly, to a force sensor with two-stage force resolution based on a flexible Roberts mechanism. Background technique [0002] During the nanoimprinting process, if different imprinting processes (hot embossing and ultraviolet imprinting) are used, the range of imprinting force is different. In order to realize real-time monitoring of the imprinting force during the imprinting process, there must be a force sensor that can meet the requirements of different ranges of imprinting forces and different resolutions. [0003] In scanning probe microscopy, variable stiffness and resolution of the probe is required when the probe scans surfaces with different hardnesses. [0004] Most of the existing force sensors are based on the measurement method of strain gauges. The strain gauges are attached to the surface of the measured object. When the strain gauges are slightly deformed, the deformation signal is c...

AI Technical Summary

Problems solved by technology

However, the existing force sensors still have the following shortcomings: (1) The existing force sensors cannot achieve two-level or even multi-level force resolution, and their measurement range is limited by the resolution

In the case of multi-level force resolution requirements, it will not be able to meet the measurement requirements; (2) the output signal of the existing force sensor is a weak analog signal, which is greatly affected by environmental noise; (3) the accuracy of the existing force sensor and resolution are limited by the force measurement range

That is, when the accuracy and resolution of the sensor increase, the measuring range of the sensor decreases and vice versa

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