Parallel two-degree-of-freedom precision motion execution mechanism based on flexible hinge

Abstract

The invention provides a parallel two-degree-of-freedom precise motion execution mechanism based on a flexible hinge, and relates to the technical field of flexible mechanisms. The mechanism comprises a mechanism body and a driving mechanism, the mechanism body comprises a fixed base, a displacement amplification mechanism, a guide mechanism, a motion decoupling mechanism and an output platform, through three-dimensional design, under the condition of the same design parameters, the motion rigidity of a motion chain mechanism in one direction in the other direction is designed to be large, and therefore the motion rigidity of the motion chain mechanism in the other direction is improved. Therefore, interference of movement in one direction to movement in the other direction is effectively reduced, namely parasitic errors are effectively reduced, and the movement precision of the mechanism is greatly improved. Meanwhile, movement in the X-axis direction and movement in the Y-axis direction can be independently controlled, the problem of decoupling compensation of movement control does not need to be considered, and therefore the complexity of a movement control system is greatly simplified, the configuration design is more reasonable, better input and output movement decoupling is achieved, the requirement of the control system is simpler, and movement control over an executing mechanism is better achieved.

Description

technical field [0001] The invention relates to the technical field of flexible mechanisms, in particular to a parallel two-degree-of-freedom precision motion actuator based on flexible hinges. Background technique [0002] A flexible mechanism refers to a mechanism that uses elastic deformation of materials to transmit or convert motion, force or energy. Compared with traditional rigid mechanisms, flexible mechanisms (hinges) have many advantages: 1) can be integrated (or integrated) design and processing, so it can simplify the structure, reduce volume and weight, and avoid assembly; 2) No gap and friction, high-precision movement can be realized; 3) No wear, long service life; 4) No lubrication, avoid pollution; 5) Structural rigidity can be increased, etc. Since the flexible mechanism can avoid many shortcomings of the traditional rigid mechanism, it is generally required in the micro-manufacturing and micro-operation of microelectronics, optoelectronic components, micr...

AI Technical Summary

Problems solved by technology

[0004] The applicant found that there are at least the following technical problems in the prior art: 1) the parasitic error of the existing related parallel kinematic actuators is relatively large, generally above 0.5%, which has great restrictions on the realization of high-precision motion; 2) the serial kinematic mechanism The accumulation of errors makes it difficult to achieve high-precision motion control; 3) The existing related motion actuators have a small motion stroke, which cannot meet the needs of large-stroke motion occasions; 4) Due to the existence of parasitic errors, if you want to achieve higher precision control , it is necessary to consider motion decoupling (motion compensation) on the control system, so the corresponding motion control system is more complicated

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