Device and method for etching copper conducting film on glass substrate ink by using pulse laser

Abstract

The invention relates to a device and a method for etching a copper conducting film on glass substrate ink by using pulse laser. An optical gate and a beam expander are arranged at the output end of a high-frequency pulse laser in turn; a 1 / 2 wave plate and a Glan prism are arranged at the output end of the beam expander in turn; a high-reflectivity lens is arranged at the output end of the Glan prism; a total reflection mirror is arranged at the output end of the high-reflectivity lens; a vibrating mirror field lens system is arranged at the output end of the total reflection mirror; the output end of the vibrating mirror field lens system is opposite to a four-axis high-accuracy platform; a charge coupled device (CCD) contrapuntal observation system is arranged above the four-axis high-accuracy platform; a plasma air blowing system is arranged on one side of the four-axis high-accuracy platform, and a dust collection system is arranged on the other side of the four-axis high-accuracy platform; a real-time power monitoring probe is also arranged at the output end of the high-reflectivity lens and is connected with the vibrating mirror field lens system through a communication system and a control system; and the high-frequency pulse laser is used for etching lines of a copper conducting film layer in an invisible area of a black ink substrate on glass.

Description

technical field [0001] The invention relates to a pulse laser etching device and method for a copper conductive film on a glass substrate ink, belonging to the technical field of laser micromachining. Background technique [0002] A capacitive touch screen is generally composed of a cover glass, an upper-line conductive sensing film layer, and a lower-line conductive sensing film layer. Among them, the main function of the cover glass is to protect the capacitive sensing film layer below, and at the same time print black ink on the back edge of the cover glass. The functions of the surrounding ink mainly have the following three functions. The first is to be beautiful; the second is to The purpose of shielding the edge lines of the invisible area; the third is to facilitate the printing of graphic symbols such as product logos. Generally, there are two types of conductive sensing film substrates: PET and glass. Among them, although the PET sensing film layer is relatively...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a device and method for pulse laser etching copper conductive film on glass substrate ink, aiming at overcoming the complex system, low processing efficiency and occupation The ground is large, easy to produce consumables, low yield and poor selectivity, etc.

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