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A planar motor with two-axis decoupling structure

A plane motor, plane phase technology, applied in the direction of electromechanical devices, electrical components, electric components, etc., can solve the problems of increasing system instability, complex structure, etc., to improve system reliability and positioning accuracy, the overall structure is simple, Easy-to-use effects

Active Publication Date: 2011-12-07
无锡金力威环保科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This makes the structure more complicated, and due to factors such as electromagnetic interference, the instability of the system is increased.

Method used

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  • A planar motor with two-axis decoupling structure
  • A planar motor with two-axis decoupling structure
  • A planar motor with two-axis decoupling structure

Examples

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Embodiment Construction

[0021] Below in conjunction with accompanying drawing and example the present invention is described in further detail.

[0022] Figure 14 It is a three-dimensional structure diagram of the present invention, figure 1 It is the overall plane structure diagram of the planar motor with biaxial decoupling structure of the present invention. The planar motor device with biaxial decoupling structure of the present invention is specifically composed of two parts, namely the workbench and the base body. The workbench is composed of a work platform 7 and permanent magnets 1 and 5 placed vertically on the platform, and the base body includes a base 10 and drive coils 2 and 4 arranged thereon, an air suspension 6. Composed of sensor 8, static support 9, coil positioner 3, etc. The driving coils 2 and 4 are vertically placed on the base and fixed by a coil positioner 3 , wherein the driving coil 2 is perpendicular to the permanent magnet 1 , and the driving coil 4 is perpendicular to ...

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PUM

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Abstract

The invention discloses a planar motor in a double-shaft decoupling structure. The planar motor disclosed by the invention comprises a base and a working platform arranged above the base, wherein a first driving coil, a second driving coil, a pneumatic suspension body, a clearance sensor and a position sensor are arranged on the base; the first and second driving coils are perpendicularly laid onthe same plane; a first permanent magnet and a second permanent magnet which are perpendicularly laid on the same plane are arranged on the working platform; the first permanent magnet is perpendicular to the first driving coil; the second permanent magnet is perpendicular to the second driving coil; and a controller is respectively connected with the two driving coils, the two sensors and the pneumatic suspension body. The double-shaft coplane decoupling structure of the invention ensures that two-dimensional motion driven by two shafts on the same plane can be realized, the structure is simplified and the reliability of a system is improved.

Description

technical field [0001] The invention relates to a planar motor, which is applied to advanced manufacturing equipment such as high-grade numerical control machine tools and photolithography machines. Background technique [0002] Planar motors can realize two-dimensional plane motion and positioning, and have a wide range of industrial needs. In modern precision and ultra-precision manufacturing industries such as machinery manufacturing, microelectronics technology, instrumentation and other industries, high-response, high-speed, and high-precision two-dimensional planar motion devices are also required (see Fu Chunnan [D]. Research on Frictional Micro-displacement Worktable Driven by Piezoelectricity, Dalian University of Technology, 2010: 9). [0003] The traditional two-dimensional planar motion device achieves two-dimensional motion through two independent mechanisms that can realize one-dimensional motion in an orthogonal superposition arrangement in space. This implem...

Claims

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Application Information

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IPC IPC(8): H02K41/00
Inventor 康宜华
Owner 无锡金力威环保科技有限公司
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