High-temperature pressure and temperature compounded sensor and preparation method thereof

Abstract

The invention provides a high-temperature pressure and temperature compounded sensor and a preparation method thereof. The invention improves the structure of the previous patent of the inventor: silicon sapphire force sensor and the preparation method thereof. The manufacturing method comprises the following steps of manufacturing a platinum thermal resistor having same materials with a strain resistance leading-through platinum welding disc and a platinum welding disc of an internal leading-through at one corner of a non-stress area on a same sapphire wafer with a silicon strain resistor; adopting a welding metal foil strip to replace the original elastic metal contact or the internal leading-through in other forms, thus preparing the high-temperature pressure and temperature compoundedsensor with strong vibration resistance and large acceleration resistance. The method solves the problem that the high reliability can not be met when the pressure and the temperature are measured ata same point in the prior art. The high-temperature pressure and temperature compounded sensor remains the advantages of the existing silicon sapphire force sensor; furthermore, compared with the similar product, the high-temperature pressure and temperature compounded sensor has the advantages of more reasonable manufacturing technology, quick operation, low relative cost, high production efficiency and the like, and obviously improves the high reliability of the measurement under the severe conditions.

Description

technical field [0001] The invention relates to a sensor for measuring pressure and temperature and its preparation method, in particular to a high-temperature sensor that can be measured at the same point at the same time under the environmental conditions of a large acceleration of 40 g or more and a high temperature of 400 ° C or higher for a measured medium such as liquid or gas. Composite sensor for pressure and temperature and its preparation method. Background technique [0002] Scientific and technological workers know that the same point measurement of the pressure and temperature of the measured medium such as liquid or gas, in special measurement environments such as spacecraft, aircraft, high-speed trains, rockets (missiles), nuclear reactors, etc., the measurement reliability requirements are very high. important and necessary. However, the existing sensors are far from meeting the requirements of measurement reliability not only in terms of manufacturing accur...

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Problems solved by technology

[0003] The purpose of the present invention is to provide a composite sensor of high temperature pressure and temperature and its preparation method, which solves the problem of high reliability in the prior art that cannot meet the requirements of measuring pressure and temperature at the same point, and not only retains the existing silicon sapphire force sensor Compared with similar products, it has the characteristics of more reasonable manufacturing process, quick operation, relatively low cost and high production efficiency, which significantly improves the high reliability of measurement under harsh conditions

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