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Treatment method of gas cylinder used for storing electronic grade ultra-pure gas

A processing method and electronic-level technology, which is applied in the direction of grinding machines, metal processing equipment, grinding/polishing equipment, etc., can solve the problems of reduced gas purity, easy contamination, and unqualified gas, and achieve the effect of ensuring cleanliness and dryness

Active Publication Date: 2011-10-19
SUZHOU JINHONG GAS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

The impurity pollution of gas cylinders includes penetration, adsorption and chemical action, etc., and the cleanliness and dryness of the inside of the gas cylinders have a direct impact on the gas quality. If the gas cylinders are not cleaned thoroughly or come into contact with the external environment, or if Without cleaning, the gas is obviously susceptible to contamination
Such a gas cylinder, even if it is filled with high-purity gas, will reduce the purity of the output gas due to the influence of the internal pollution of the gas cylinder, and even become a substandard product to a certain extent.

Method used

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Examples

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Embodiment Construction

[0015] Now the present invention will be better described by specific examples.

[0016] A method for processing a gas cylinder filled with an electronic-grade ultra-high-purity gas, the method comprising the steps of:

[0017] 1) Cleaning and drying treatment inside the gas cylinder: use pressure 6kg / cm 2 Rinse the inside of the newly purchased steel seamless gas cylinder with tap water, turn the gas cylinder while rinsing, and use an endoscope to check until the inside is rinsed until there is no rust. After the rinsing, use hot steam to blow the The inner wall is dried so that there is no free oil and water on the inner wall. The hot steam purging mentioned therein requires the use of the following equipment: electric heating furnace, leaf blower, hot blowing bracket, endoscope and corresponding pipelines and temperature control instruments; when using hot steam to purge gas cylinders, the gas cylinders must be turned upside down , the steel pipe for hot blowing should be...

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Abstract

The invention relates to a treatment method of a gas cylinder used for storing pure or ultra-pure gas, which has a strict demand upon the cleanness inside the gas cylinder. The method comprises the steps of: gas cylinder cleaning and drying, internal rust removing, re-cleaning, inner wall grinding, third-time cleaning, deionizing, and deep vacuuming and displacing. With the method provided by the present invention, impurities inside the gas cylinder can be removed, internal cleanness and draught of the gas cylinder can be maintained, and the gas cylinder satisfies the requirements of electronic grade ultra-pure gas storing.

Description

technical field [0001] The invention relates to a processing method for gas cylinders. This type of gas cylinder is mainly used for filling electronic-grade high-purity and ultra-high-purity gases. gas. Background technique [0002] With the continuous development of modern industry, the demand for gas purity in all walks of life is increasing, especially in semiconductor light emitting device LED, liquid crystal display LCD, solar photovoltaic SOLAR and integrated circuit microelectronics and other industries. For example, one of the key materials required by the electronics industry is various high-purity and ultra-high-purity gases with extremely high purity. Due to the development of ultra-large-scale and ultra-large-scale integrated circuits, the requirements for these high-purity and ultra-high-purity gases are also increasing. Strict, not only require high purity, ultra-pure, even require ultra-clean in some special links. In the integrated circuit industry, from th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24C1/10B24B19/00
Inventor 金向华刘志军
Owner SUZHOU JINHONG GAS CO LTD
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