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Process technology of method for preparing silane by using magnesium silicide

A process technology, the technology of magnesium silicide, applied in the field of silicon chemical products, can solve problems such as pollution, and achieve the effect of reasonable process technology and convenient preparation

Inactive Publication Date: 2011-10-05
TIANJIN TAIHENG GASES
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This technology not only has reasonable process and simple preparation, but also improves the purity of silane produced to 5N (99.999%) and solves the problem of environmental pollution

Method used

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  • Process technology of method for preparing silane by using magnesium silicide
  • Process technology of method for preparing silane by using magnesium silicide
  • Process technology of method for preparing silane by using magnesium silicide

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Embodiment Construction

[0025] refer to figure 1 The method for preparing silane is → raw material preparation system (13) → silane gas preparation system (14), → molecular sieve adsorption purification silane liquefaction and vaporization system (20). In this method, magnesium silicide and ammonium chloride are reacted in liquid ammonia at about -20°C to obtain silane.

[0026]

[0027] Preparation of silane method equipment consists of liquid ammonia feed port (1), silicon powder feed port (2), magnesium powder feed port (3), ammonium chloride feed port (4), magnesium silicide synthesis furnace (5), pulverizing and drying equipment ( 6), magnesium silicide and ammonium chloride mixing device (7), vacuum equipment (8), liquid ammonia storage tank (23) is assembled into raw material preparation system (13) by connecting pipeline (21); continuous feeding device (9) , reaction kettle (10), liquid ammonium reflux column (11), ammonia condenser (12), refrigeration equipment (22) is assembled into sil...

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Abstract

The invention discloses a process technology of a method for preparing silane by using magnesium silicide. In the method process for preparing the silane, a raw material preparation system, a silane gas preparation system and a molecular sieve adsorption purification silane liquefaction and vaporization system are mainly provided. The technology has a reasonable process, makes manufacture simple and is an ideal technology for silane preparation.

Description

Technical field [0001] The invention relates to a silicon chemical product, in particular to a process technology for preparing silane from magnesium silicide, which is suitable for chemical synthesis of silane. Background technique [0002] At present, microelectronics technology is the main cornerstone of modern information technology and military technology, and one of the key factors to promote scientific and technological progress, industrial development, economic take-off and social advancement. Integrated circuit is the core of microelectronics technology, and its development level and industrial scale have become an important symbol to measure a country's economic strength. Electronic specialty gases (such as silane), especially high-purity electronic gases as a new category of electronic chemical materials, are important factors restricting the reliability and yield of integrated circuits. With the rapid development of electronic information technology, the degree ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/04
Inventor 李中元
Owner TIANJIN TAIHENG GASES
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