Quartz heating groove

A quartz heating and quartz technology, applied in heating elements, water heaters, fluid heaters, etc., can solve the problems of poor heat preservation effect, rapid temperature drop of quartz heating tank, waste of electric energy, etc., and achieve the effect of ensuring heat preservation time

Inactive Publication Date: 2012-10-10
SUZHOU KC QUARTZ ELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The temperature of the quartz heating tank with this structure drops rapidly, and the heat preservation effect is poor, resulting in higher chip pickling costs and a waste of electric energy

Method used

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  • Quartz heating groove

Examples

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Embodiment Construction

[0011] Such as figure 1 As shown, the quartz heating tank according to this embodiment includes a quartz tank body 1, a thermocouple protection tube 2 arranged in the quartz tank body 1, a heating resistance wire 3 attached to the outer surface of the quartz tank body 1, and a heating resistance wire 3 arranged on the outer surface of the quartz tank body 1. The PP plastic layer 4 around the wire 3 and the quartz wool layer 5 filled between the heating resistance wire 3 and the PP plastic layer 4 . A drain port 10 is provided at the middle of the bottom of the quartz tank body 1 , and the quartz heating tank also includes a drain pipe 6 passing through the PP plastic layer 4 , the quartz wool layer 5 and the heating resistance wire 3 to communicate with the drain port 10 . In addition, a wire outlet 7 is also provided on the PP plastic layer 4 . The heating resistance wire 3 is made of nickel-chromium wire.

[0012] In the heating tank of the present invention, a heatin...

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PUM

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Abstract

The invention relates to a quartz heating groove, comprising a quartz groove body and a thermocouple protecting pipe arranged in the quartz groove body, wherein the bottom of the quartz groove body is provided with a liquid discharging port; the quartz heating groove further comprises a heating resistance wire attached at the outer surface of the quartz groove body, a PP (polypropylene) plastic layer arranged at the periphery of the heating resistance wire and a quartz cotton layer filled between the heating resistance wire and the PP plastic layer; and the quartz heating groove further comprises a liquid discharging pipe which penetrates through the PP plastic layer, the quartz cotton layer and the heating resistance wire. In the quartz heating groove, the heat resistance wire is attached at the outer surface of the quartz groove body, and a quartz cotton insulating layer is also arranged at the outer surface of the quartz groove body, so that the insulating effect is good and the insulating time of a chip in the acid pickling process is guaranteed.

Description

technical field [0001] The invention relates to a quartz heating tank. Background technique [0002] In the semiconductor industry, pickling of chips is usually carried out in quartz heating baths. The quartz heating tank generally includes a quartz tank body and a thermocouple protection tube arranged in the quartz tank body, and a liquid discharge port is provided at the bottom of the quartz tank body. The temperature of the quartz heating bath with this structure drops rapidly, and the heat preservation effect is poor, which leads to high chip pickling cost and wastes electric energy. Contents of the invention [0003] The technical problem to be solved by the invention is to overcome the deficiencies of the prior art and provide a quartz heating tank with good thermal insulation effect. [0004] In order to solve the problems of the technologies described above, the present invention adopts the following technical solutions: [0005] A quartz heating tank, comprisin...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/00H01L21/673H05B3/06F24H1/18
Inventor 沈法松
Owner SUZHOU KC QUARTZ ELECTRONICS
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