Parameter adjustable type polishing clamp device for heavy-calibre plane optical element

Abstract

The invention provides a parameter adjustable type polishing clamp device for a heavy-calibre plane optical element, relating to a polishing clamp device. The polishing clamp device comprises a mass block, a clamp flat plate, an upper hydraulic piston device, a lower hydraulic piston device, a hydraulic oil transmission and return device, a pressure sensor, a servo magnifier and an industrial personal computer, wherein the mass block is sleeved in a center shaft on the upper surface of the clamp flat plate, the upper hydraulic piston device and the lower hydraulic piston device are separated by a partition plate, are respectively adsorbed on the lower surface of the clamp flat plate and an upper surface of a workpiece by adsorption base membranes, and are respectively provided with a hydraulic cylinder, hydraulic oil, a piston, a push rod, a sealing ring, a spring, an oil transmission hole and an oil return hole, wherein the lower end of the push rod is connected with the piston through the spring, the upper end of the push rod is connected with a basic body of each adsorption base membrane, the oil transmission hole and the oil return hole are connected with an oil transmission hole and an oil return hole of the hydraulic oil transmission and return device, the sensor is embedded in a polishing gasket, the pressure signals of the sensor are put into a data acquisition card after passing through the servo amplifier, and the data acquisition card is installed on the industrial personal computer. The polishing clamp device is simple and practical in structure.

Description

technical field [0001] The invention relates to a polishing jig device, in particular to a parameter-adjustable polishing jig device for large-diameter flat optical elements. Background technique [0002] At present, how to realize high-efficiency batch processing of high-precision large-aperture optical components, especially large-aperture planar components, is an important issue in the field of optical manufacturing. After rough grinding, fine grinding or precision grinding, large-aperture planar optical components are required to be polished to improve surface accuracy and reduce surface roughness and subsurface defects. At present, the development of optical component polishing technology has made great progress, but for large-diameter planar optical components, especially for large-diameter planar optical components with a size of not less than 430mm×430mm, the progress is not great. The uncontrollability and uncertainty of the pressure in the contact area of ​​optica...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a simple and practical parameter-adjustable large-diameter optical element for traditional annular polishing processing of large-diameter planar optical elements, the uncontrollability and uncertainty of the pressure in the contact area between the element and the polishing pad, and low processing efficiency. Aperture Plane Optical Component Polishing Fixture

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