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Method for preparing TiWN/MoS2 composite film

A composite thin film and thin film technology, which is applied in ion implantation plating, metal material coating process, coating, etc., can solve the problems that the film cannot reach the service life, high friction coefficient, etc., so as to reduce the contact area and shear strength, Effect of lower friction coefficient and higher productivity

Inactive Publication Date: 2014-01-01
无锡润鹏复合新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The TiWN film formed by adding W to TiN improves the hardness of the film, and has excellent oxidation resistance and corrosion resistance, but the TiWN film itself is very brittle and has a high friction coefficient, and the film cannot reach the expected level during the wear process. service life

Method used

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  • Method for preparing TiWN/MoS2 composite film
  • Method for preparing TiWN/MoS2 composite film
  • Method for preparing TiWN/MoS2 composite film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] Prepare TiWN / MoS as follows 2 Composite film:

[0021] (1) Pretreatment: first, the surface of Cr40 steel is polished, then cleaned and dried with acetone, alcohol and deionized water successively to obtain the base material;

[0022] (2) Preparation of TiWN film: in a mixed protective atmosphere with a volume ratio of nitrogen and argon of 3:1, using Ti target and W target by magnetron sputtering method, with 200W power to carry out reactive sputtering on the surface of the above substrate Shot to generate TiWN thin film;

[0023] (3) Preparation of MoS 2 Thin film: in argon atmosphere, using MoS 2 The target was sputtered MoS on the above TiWN film by magnetron sputtering method with a power of 150W 2 thin film, prepared TiWN / MoS 2 Composite film.

Embodiment 2

[0025] Prepare TiWN / MoS as follows 2 Composite film:

[0026] (1) Pretreatment: first, the surface of Cr40 steel is polished, then cleaned and dried with acetone, alcohol and deionized water successively to obtain the base material;

[0027] (2) Preparation of TiWN thin film: in a mixed protective atmosphere with a volume ratio of nitrogen and argon of 2:1, using Ti target and W target by magnetron sputtering method, with a power of 250W, react sputtering on the surface of the above substrate Shot to generate TiWN thin film;

[0028] (3) Preparation of MoS 2 Thin film: in argon atmosphere, using MoS 2 The target was sputtered MoS on the above TiWN film by magnetron sputtering method with a power of 150W 2 thin film, prepared TiWN / MoS 2 Composite film.

[0029] Practice has proved that the TiWN / MoS of the present invention 2 The preparation method of the composite film has the characteristics of cheap and easy-to-obtain raw materials, simple process, safety and environme...

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Abstract

The invention discloses a method for preparing a TiWN / MoS2 composite film, which comprises the following steps of: with a Ti target, a W target and a MoS2 target as raw materials, under the protection of nitrogen and / or argon, sequentially sputtering on a base material after surface finishing and cleaning with a magnetron sputtering method to obtain a TiWN film and a MoS2 film, thereby obtaining a TiWN / MoS2 composite film, wherein the TiWN film is a hard film, and the MoS2 film is a soft film for protecting the hard film. The composite film has good properties of antifriction and wear resistance and can be used as a protective coating of a machinery part to play roles in increasing the mechanical property and prolonging the service life. Moreover, the requirements for production conditions are low, the process is simple, the cost is low, the yield is high, and the composite film is suitable for large-scale industrial production.

Description

technical field [0001] The invention relates to a preparation method of a composite thin film, more specifically, a TiWN / MoS 2 Preparation method of composite film. Background technique [0002] Hard thin films are widely used to control friction and wear. In order to further improve the performance of thin films, many methods have been proposed, such as multi-component composites, multilayer films and superlattices. Most studies focus on how to improve the mechanical strength of the film itself, while ignoring its negative effect on friction behavior. [0003] The TiWN film formed by adding W to TiN improves the hardness of the film, and has excellent oxidation resistance and corrosion resistance, but the TiWN film itself is very brittle and has a high friction coefficient, and the film cannot reach the expected level during the wear process. service life. Contents of the invention [0004] The purpose of the present invention is to provide a wear-resistant and frictio...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/35
Inventor 李长生莫超超唐华范有志胡志立
Owner 无锡润鹏复合新材料有限公司
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