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Method for manufacturing micro-nano fluid control system by using low-pressure bonding technology

A production method, micro-nano technology, applied in the field of micro-nano fluid system production, can solve problems such as excessive bonding temperature and pressure, deformation of microfluidic pipelines, and damage to microstructure patterns, etc., to achieve easy channel blockage, good flexibility, and uniformity Good results

Inactive Publication Date: 2011-05-18
HEFEI UNIV OF TECH
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  • Claims
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Problems solved by technology

The most used method is the thermocompression bonding method, which is simple to implement, but usually requires too high bonding temperature and high pressure, which will cause serious deformation of the microfluidic pipeline or damage the microstructure pattern, and even pipeline blockage. Happening
When the temperature and pressure are too low, the bonding strength will be reduced, resulting in failure to bond.

Method used

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  • Method for manufacturing micro-nano fluid control system by using low-pressure bonding technology

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Embodiment Construction

[0027] The specific implementation process is shown in Figure 1, wherein Figure 1 (A1) is the preparation of the substrate and template; Figure 1 (A2) is the nanoimprint technology to replicate the grating pattern; Figure 1 (A3) is to remove the imprint template; Figure 1 (A4) is the double-layer SU-8 structure of the PET substrate; Figure 1 (A5) is the preparation for bonding; Figure 1 (A6) is the roller so that the bonding layer is in full contact with the grating structure layer; Figure 1 (A7) is placed on the heavy Heating on the physical heating platform to complete the bonding; drying after exposure in Figure 1 (A8), separating the PET substrate, and completing the channel fabrication.

[0028] In this embodiment, the low-pressure bonding technology is used to manufacture the micro-nano fluidic system according to the following steps:

[0029] 1. Take the glass sheet as the base, wash it with water and acetone, put it in an oven, and bake it at 130°C for 20 minutes to re...

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Abstract

The invention discloses a method for manufacturing a micro-nano fluid control system by using a low-pressure bonding technology, which is characterized by comprising the following steps: firstly taking a glass sheet as a substrate to manufacture a KMPR master mask with raster graphics and a PDMS soft stamp; using the PDMS soft stamp to manufacture a raster nano-sized structural Si substrate for manufacturing follow-up nano-channels; using a polyethylene terephthalate (PET) slice to manufacture a PET sheet with double layers of SU-8 photoresist; and manufacturing the micro-nano fluid control system by using the raster nano-sized structural Si substrate and the PET sheet with double layers of SU-8 photoresist. The channels manufactured by the method have the advantages of good uniformity, less possibility of blockage, high success rate, and low manufacturing cost, are flexible in operation and are suitable for large-area production.

Description

technical field [0001] The invention relates to a manufacturing method of a micro-nano fluid system, belonging to the technical field of micro-nano fluid system manufacturing. Background technique [0002] In recent years, the basic and technical application research related to nanofluidic systems has become an attractive frontier field. It is generally defined as the cross-section of the channel for fluid flow in the size range of hundreds to several nanometers. The fluid transport in it has specific properties, which can change many physicochemical properties that dominate the macroscopic and microscale fluid transport and molecular behavior. The research based on this system not only breaks through some important concepts of traditional theories, but also some in-depth research results have important applications in many fields such as stretching manipulation of DNA molecules, drug release technology, battery technology, and lasers. [0003] At present, the main material...

Claims

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Application Information

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IPC IPC(8): B81C1/00
Inventor 王旭迪金建李鑫汤启升郑正龙
Owner HEFEI UNIV OF TECH
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