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Device and method for detecting impurities in corrosive gas

A technology for corrosive gases and impurities, which is applied in the field of devices for analyzing and detecting impurities in corrosive gases, can solve the problems of different analysis and detection elements, unable to meet the detection requirements, etc., and achieves a good separation effect, a simple structure, and a simple and fast analysis process. Effect

Active Publication Date: 2010-11-24
江苏炫一科学仪器有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Moreover, the analysis and detection components of high-purity and low-purity gases are different, and existing equipment such as a single gas chromatograph cannot meet the detection requirements

Method used

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  • Device and method for detecting impurities in corrosive gas
  • Device and method for detecting impurities in corrosive gas
  • Device and method for detecting impurities in corrosive gas

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Such as figure 1 and figure 2 As shown, a device for analyzing impurities in corrosive gases, its structure includes a three-way auxiliary carrier gas flow stabilization system, corrosive gas base gas passage 104, helium passage 105, corrosion-resistant belt purging ten-way valve 2, Sampling column 3, corrosion-resistant belt purge six-way valve 5 and corrosion-resistant belt purge four-way valve 7, pre-separation column 603, analytical chromatographic column A601, and analytical chromatographic column B602.

[0027] Corrosion-resistant ten-way valve with purge 2 has ten channels, the first auxiliary carrier gas flow stabilization system 101 is connected to the seventh channel 207 of corrosion-resistant ten-way valve 2 with purge, the second auxiliary carrier gas flow stabilization system The system 102 is connected to the fourth channel 204 of the corrosion-resistant belt purging ten-way valve 2, and the two ends of the sampling column 3 are respectively connected to...

Embodiment 2

[0042] For low-purity corrosive gases, the content of impurity components is relatively high. The sampling process is the same as in Example 1. The third channel of the corrosion-resistant belt purging four-way valve is connected to the fourth channel, and the first channel is connected to the second channel. . The auxiliary carrier gas I flows out of the analytical chromatographic column A or analytical chromatographic column B with impurity components and then enters the thermal conductivity detector 802 for analysis and detection. All the other are with embodiment 1.

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Abstract

The invention relates to a method and a device for detecting gas and discloses a device and a method for detecting and analyzing impurities in corrosive gas. In the device, the impurities in the corrosive gas is separated and detected by switching a valve to change the flow direction of the gas. The device has the advantages of simple structure, simple and rapid analysis process, on-line detection and good impurity component separation effect, and can meet the analytic requirements on the corrosive gases of different impurities.

Description

technical field [0001] The invention relates to a gas detection device and method, in particular to a device and method for analyzing and detecting impurities in corrosive gases. Background technique [0002] Corrosive gases, such as halogen-based chlorine and fluorine, etc., need to detect the components of impurity gases contained in them when analyzing their purity. These impurity gas components include hydrogen, oxygen, nitrogen, methane, carbon monoxide, carbon dioxide, sulfur hexafluoride, silicon tetrafluoride, carbon tetrafluoride, and the like. [0003] The above-mentioned impurity components have many types, different contents, and large differences in molecular weight. Therefore, when analyzing and testing, it is necessary to separate the components one by one before analyzing them. Moreover, the analysis and detection components of high-purity and low-purity gases are different, and existing equipment such as a single gas chromatograph cannot meet the detection ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N30/46
Inventor 薛翔
Owner 江苏炫一科学仪器有限公司
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