Chemical mechanical polishing device, polishing method and system for wafer
A chemical machinery and grinding method technology, applied in electrical components, grinding devices, grinding machine tools, etc., can solve the problems of general products and methods without suitable structures and methods, inconvenience, etc., to reduce chemical reaction time, reduce use, reduce The effect of wafer bending
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[0076] In order to further illustrate the technical means and effects that the present invention adopts for reaching the intended invention purpose, below in conjunction with the accompanying drawings and preferred embodiments, the chemical mechanical polishing element, the polishing method of the wafer and the wafer polishing system proposed according to the present invention will be described. ) Its specific implementation, structure, method, step, feature and effect thereof are described in detail as follows.
[0077] The aforementioned and other technical contents, features and effects of the present invention will be clearly presented in the following detailed description of preferred embodiments with reference to the drawings. For convenience of description, in the following embodiments, the same elements are denoted by the same numbers.
[0078] The present invention relates to a semiconductor substrate polishing apparatus, and in many embodiments, more particularly to ...
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