Flatness error control method for single-point diamond turning method machining large-sized optical elements

Abstract

The invention relates to a flatness error control method for the single-point diamond turning method machining large-sized optical elements, which relates to the field of the ultraprecision machining of large-sized fragile optical elements. The invention solves the problems that: when the conventional SPDT method machines a large-sized optical element, the flatness error is high, and the surface figure precision can be hardly guaranteed. The flatness error control method first utilizes an interferometer to detect the flatness topography and the flatness error Delta of a large-sized optical element on a bed, the inclination angle of the axis of a fly-cutter head is then calculated according to the flatness error Delta, three wedged spherical supporting bodies are adjusted according to the detected flatness topography, so that the angle of the fly-cutter head can be deflected, the adjusted machine tool is finally utilized to carry out the secondary ultraprecision machining of the optical element, the interferometer is utilized again to redetect the flatness topography and the flatness error Delta, and when the flatness error Delta meets the requirement of a fusion system, flatness error control is fulfilled for the single-point diamond turning method machining the large-sized optical element. The invention is applicable to the machining of the surface figures of large-sized optical elements.

Description

technical field The invention relates to the field of ultra-precision machining of brittle optical elements, in particular to a flatness error control method for processing large-size optical elements by using a single-point diamond milling (SPDT) method. Background technique Human beings' heavy dependence on fossil energy is the main cause of environmental degradation, and it is urgent to find new alternative energy sources. Fusion energy is clean, pollution-free and almost inexhaustible. Using laser to control nuclear fusion to obtain energy is an ideal way to solve energy problems in the future. At present, all developed countries attach great importance to it. The laser output by the laser driver requires good beam quality, high enough laser energy and power density. To meet this requirement, a large number of electro-optical and nonlinear optical material components, such as KDP crystal, neodymium glass, K9 glass, Quartz glass etc. The common requirements of laser con...

AI Technical Summary

Problems solved by technology

In order to solve the problems that the existing SPDT method has large flatness errors and difficult to guarantee surface shape accuracy when processing large-size optical elements, the present invention provides a flatness error control method for processing large-size optical elements by single-point diamond milling

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