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Magnetooptic ellipsometry measurement device and measurement method

A measuring device and magneto-optical technology, which can be used in measuring device, phase influence characteristic measurement, material analysis by optical means, etc., and can solve the problem of difficult and accurate measurement of incident angle

Inactive Publication Date: 2010-10-20
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the small gap between the magnetic poles of the electromagnet, it has been difficult to accurately measure the angle of incidence. In this patent, we modified the spectrometer and introduced it into the measurement optical path, thus solving this problem well

Method used

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  • Magnetooptic ellipsometry measurement device and measurement method
  • Magnetooptic ellipsometry measurement device and measurement method
  • Magnetooptic ellipsometry measurement device and measurement method

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Embodiment 1

[0042] Embodiment 1: (device embodiment)

[0043] A magneto-optical ellipsometry device, such as figure 1 As shown, it consists of a power supply, a laser light source 1, an optical path system, an electromagnet 6, and a PC machine 11. It is characterized in that the optical path system consists of an attenuation plate 2, an aperture 3, a polarizer 4, a spectrometer 5, an analyzer 8, Composed of diaphragm 9 and CCD10, the optical path system is located behind the laser light source 1, and is arranged successively as attenuator 2, diaphragm 3, polarizer 4, spectrometer 5, analyzer 8, diaphragm 9, CCD10; the output end of CCD10 is connected on the PC 11, to observe and record and calculate the measurement result.

Embodiment 2

[0044] Embodiment 2: (method embodiment)

[0045] A method for magneto-optical ellipsometry utilizing the above-mentioned device, the steps are as follows:

[0046] ① Connect the measuring device to the power supply, supply power to the CCD10, light up the laser light source 1 and the PC 11, and turn on the electromagnet power supply 7;

[0047] ② place the spectrometer 5 between the two magnetic poles of the electromagnet 6, and make the sample stage 12 on the spectrometer 5 be located at the center of the magnetic field;

[0048]③ Fix the sample on the sample stage 12, adjust the sample to rotate in the horizontal direction, so that the sample surface is parallel or perpendicular to the magnetic field direction (when the sample surface is parallel to the magnetic field direction, the longitudinal magneto-optical ellipsometric test can be carried out; vertical poloidal magneto-optical ellipsometry);

[0049] ④ Adjust the positions of the attenuation plate 2, aperture 3, and...

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Abstract

The invention relates to a magnetooptic ellipsometry measurement device and a measurement method, which belong to the technical field of magnetooptic measurement on magnetic materials. The device comprises a power source, a laser source, a light path system, electromagnets and a personal computer, and can be used for carrying out magnetooptic ellipsometry measurement. The invention is characterized in that: (1) spectrometers added in the light path can accurately measure the angle of incidence, and because the resolution of the angle measurement of the spectrometer can reach 0.01 degrees, the measurement precision is high; (2) by modifying the spectrometer, a collimator of the spectrometer can be dismounted, the electromagnets do not need to be moved during angle measurement, and thereby measurement is more accurate and convenient; (3) the light path is simple and practical, and the optical elements needed by the light path are universal optical elements, so the cost is low; (4) operation is convenient, and longitudinal and polar magnetooptic ellipsometry measurements can be carried out on material without moving the electromagnets.

Description

Technical field [0001] The invention relates to a magneto-optical ellipsometry device and a measurement method, belonging to the technical field of magneto-optic measurement of magnetic materials. Background technique [0002] The magneto-optical properties of magnetic materials are widely used in magneto-optical storage. Magneto-optic ellipsometry is a very important detection method for the magneto-optical properties of magnetic thin films and ultra-thin films. The refraction of ferromagnetic samples can be measured by using magneto-optical ellipsometry. Ratio N, extinction coefficient K, magneto-optical coupling coefficient Q, etc. At the same time, it can also be used to study magnetic order, magnetic anisotropy, and interlayer coupling. Compared with other magneto-optical property measurement methods, magneto-optical ellipsometry has the following advantages: (1) The measurement sensitivity is extremely high, and the measurement of subatomic layer magnetism can be reali...

Claims

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Application Information

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IPC IPC(8): G01N21/21G01N21/41G01N21/01
Inventor 连洁宋平薛其坤王晓李萍高尚马峥吴仕梁
Owner SHANDONG UNIV
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