Device for automatically adjusting pressure of flowing gas
A flow gas, automatic adjustment technology, applied in the direction of valve device, valve operation/release device, valve details, etc., can solve the problems that cannot be realized, cannot obtain high-order harmonics, and poor adjustment effect, so as to improve real-time accuracy , fast response time, stable air pressure
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[0020] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0021] see first image 3 , Figure 4 , image 3 It is an overall block diagram of the automatic adjustment of the flowing gas pressure in the gas box for the interaction between the supply gas in the target chamber and the femtosecond laser in the embodiment of the automatic adjustment device for the flowing gas pressure of the present invention, Figure 4 It is a structural schematic diagram of an embodiment of the low-pressure flowing gas pressure regulating valve of the present invention. As can be seen from the figure, the automatic regulating device for flowing gas pressure of the present invention includes a vacuum gauge 6 and a valve body. The valve body is a fine-tuning valve body 13. The air valve 9 has a vacuum probe 5 at the air delivery end, and a piezoelectric ceramic valve 3 is also located between the fine-tuning intake valve 9 and th...
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