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Gas refracting index sensor based on nanometer cavity antenna array

A technology of gas refractive index and cavity antenna, applied in the field of sensors

Inactive Publication Date: 2010-09-29
CHONGQING UNIV OF ARTS & SCI
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  • Abstract
  • Description
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Problems solved by technology

As far as we know, no one has proposed a nanocavity antenna array-excited surface plasmon resonance gas sensor for the 1550 nm band

Method used

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  • Gas refracting index sensor based on nanometer cavity antenna array
  • Gas refracting index sensor based on nanometer cavity antenna array
  • Gas refracting index sensor based on nanometer cavity antenna array

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Embodiment Construction

[0018] Metal composite structures with enhanced transmission efficiency of nanoslits were fabricated by nanoimprinting, reactive ion assisted etching, physical sputtering, focused ion beam and electron beam lithography. The production process proceeds in the following steps:

[0019] First, a 30-nanometer-thick quartz layer is plated on a metallic silver substrate.

[0020] Then, spin-coat a layer of polymethyl methacrylate (PMMA) with a thickness of 20 nanometers on the quartz layer, heat it to 200°C (105°C higher than the glass transition point of polymethyl methacrylate), and place the prefabricated A silica template (with a grating pattern with a period of 1100 nm, a duty ratio of 0.5, and a depth of 20 nm) was pressed into the polymethylmethacrylate at a pressure of 15 MPa. At this time, polymethyl methacrylate is higher than its glass transition point temperature of 105 ° C, similar to a viscous liquid, and can flow under pressure. Keep the pressure constant, lower the...

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Abstract

The invention relates to a sensor used for testing the value of the gas refracting index, which is characterized in that the structure consists of a metal optical grating layer, an air gap separation layer and a metal substrate layer. When the incoming wavelength is ranged from 1548 to 1553 nanometers and the incoming angle is ranged from 22 to 24 degrees, the sensitivity of the gas sensor is as high as 2800 nanometers / RIU. Particularly, when the period of the metal optical grating is 1100 nanometers, the thickness of the optical grating is 20 nanometers, and when the air gap separation layer thickness is 30 nanometers, the flexibility of the sensor is as high as 3050 nanometers / RIU.

Description

technical field [0001] This patent relates to the field of sensors, in particular to a wavelength-detecting gas refractive index sensor based on a nanocavity antenna array to excite surface plasmon resonance effects with a central working wavelength of 1550 nanometers. Background technique [0002] In recent years, with the continuous improvement of people's living standards and the increasing emphasis on environmental protection, the detection of various toxic and harmful gases, the monitoring of air pollution, industrial waste gas, and the detection of food and living environment quality are all proposed for gas sensors. higher requirements. With the improvement of technical requirements and the application of advanced science and technology, gas sensors are developing towards the trend of miniaturization, intelligence and multi-function. [0003] Due to the increasingly high requirements for the accuracy, performance and stability of gas sensors in the fields of industri...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/41
Inventor 赵华君袁代蓉
Owner CHONGQING UNIV OF ARTS & SCI
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