Bionic micro/nano structure preparing method

Abstract

The invention provides a bionic micro / nano structure preparing method by combining top-down and bottom-up modes, which comprises the following steps of: firstly, preparing a microscale structure serving as a substrate by the top-down method which mainly comprises film growing, photoetching, dry etching and the like; secondly, selectively performing evaporative deposition on seeds for growing a nano structure on the top or the side wall of the microscale substrate; thirdly, growing the direction controllable nano structure from the seeds by the bottom-up method; and finally, preparing the hierarchical layering period / standard period bionic micro / nano structure with excellent characteristics, such as gecko seta-simulated micro / nano structure, morpho lepidoptera-simulated micro / nano structure and the like. The method is an integrated preparation method by combining the top-down and bottom-up preparation processes, has the characteristics of high efficiency and low cost, is suitable for massive large-area production and is a new effective way for massive preparation and application of the bionic micro / nano structure.

Description

Technical field: [0001] The invention belongs to the field of micro-nano processing, and specifically relates to a method for preparing a bionic micro-nano structure combining top-down and bottom-up, and is suitable for high-efficiency and low-cost mass production of biomimetic micro-nano structures such as butterfly phosphor wings , Imitate the micro-nano structure of gecko feet, and promote the preparation and application of bionic micro-nano structures. Background technique: [0002] After the natural selection of "survival of the fittest" and hundreds of millions of years of evolution, the surface of natural organisms has shown a variety of functions and formed many unique structures and excellent characteristics. Studies have found that the unique functions of organisms are closely related to the surface, especially the surface microstructure, and the surface microstructure shows a certain rule, which is determined by the basic structure of micro and nano It is arranged reg...

AI Technical Summary

Problems solved by technology

[0004] However, for the typical complex biomimetic structure combining micro-nano (scale changes from tens of nanometers to hundreds of microns), it is difficult to prepare a complete structure by conventional processes

The current research, or directly using biological templates combined with atomic layer deposition (ALD, Atomic Layer Deposition), or using FIB (Focused Ion Beam) processing, etc., the equipment is expensive, the processing speed is slow, the efficiency is low, and the cost is too high

Images