Double-sided reflecting moving mirror interferometer
A double-sided mirror and double-sided reflection technology, applied in the field of interferometers, can solve the problems of the large size of the cat-eye moving mirror, the large driving force of the moving mirror, and the poor thermal stability, so as to eliminate the problem of lateral movement of the moving mirror and reduce the driving force. , good thermal stability
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[0022] The invention provides a double-sided reflective moving mirror interferometer. The double-sided reflective moving mirror interferometer includes a beam splitter 1, a plane mirror 2, a double-sided reflective moving mirror 3, a corner reflector 4, and a double-sided mirror drive. System 5 and the detection and collection system; the plane mirror 2 is arranged on the reflection or transmission light path of the beam splitter 1; the corner reflector 4 is arranged on the transmission or reflection light path of the beam splitter 1; the double-sided mirror driving system 5 drives the double The surface reflective moving mirror 3 performs linear reciprocating motion; the double-sided reflective moving mirror 3 is arranged on the reflection light path of the flat mirror 2 and the corner reflector 4; the double-sided reflective moving mirror 3 will be incident on a coated surface of the double-sided reflective moving mirror The incident light is reflected by the plane mirror 2 to...
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