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Transparent electropane and manufacturing method thereof

A technology of transparent conductive film and manufacturing method, which is applied in the field of transparent conductive film glass and its manufacturing, and can solve the problems of poor uniformity of resistance value of transparent conductive film glass square, low transmittance of transparent conductive film glass, high haze of transparent conductive film glass, etc. Problems, to achieve superior shielding effect, low cost, high production efficiency

Active Publication Date: 2012-11-21
XINYI PHOTOVOLTAIC IND (ANHUI) HLDG CO LTD
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Problems solved by technology

[0007] The technical problem to be solved by the present invention is to provide a transparent conductive film glass and its manufacturing method, aiming to solve the problems of low transmittance and high sheet resistance value of the existing transparent conductive film glass
[0008] The further technical problem to be solved by the present invention is to provide a transparent conductive film glass and its manufacturing method, aiming to solve the problem of poor uniformity of the square resistance value of the existing transparent conductive film glass
[0009] Another technical problem to be solved by the present invention is to provide a transparent conductive film glass and its manufacturing method, aiming to solve the problem of high haze of transparent conductive film glass in the field of solar thin film batteries

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  • Transparent electropane and manufacturing method thereof
  • Transparent electropane and manufacturing method thereof
  • Transparent electropane and manufacturing method thereof

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Embodiment Construction

[0022] In order to make the technical problems to be solved, technical solutions and beneficial effects of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0023] see Figure 1 to Figure 3 , the transparent conductive film glass has a glass substrate 1, a silicon film 2 deposited on the surface of the glass substrate 1, and an aluminum-doped zinc oxide transparent conductive film 3 deposited on the surface of the silicon film 2.

[0024] The thickness of the silicon film 2 is 30-150nm, wherein the mass percentage of elemental silicon is 97%-99.5%, the mass percentage of aluminum is 0.5%-3%, and the thickness of the aluminum-doped zinc oxide transparent conductive film 3 is 300nm -3 μm, wherein the mass percentage of ...

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Abstract

The invention relates to a transparent electropane and a manufacturing method thereof. The transparent electropane is provided with a glass substrate, a silica film deposited on the surface of the glass substrate and an Al-doped zinc oxide transparent conductive film deposited on the surface of the silicon oxide film. The manufacturing method comprises the following steps: (1) pretreating the glass substrate; (2) depositing a layer of silicon oxide film on the glass substrate; (3) depositing a layer of Al-doped zinc oxide transparent conductive film on the silicon oxide film; and (4) selectively etching the transparent electropane or depositing a layer of silicon oxide film or silicon nitride film on the Al-doped zinc oxide transparent conductive film. The transparent electropane is produced in an off-line method, the optimization rate of the glass sheet can be increased, the transmissivity is high, the cost is lower, and the production efficiency is high. The sheet resistance value of the Al-doped zinc oxide transparent electropane is low, so sunlight can penetrate very well, the photoelectric conversion rate of a thin film solar cell is increased, and the shielding effect is superior on a shielding material.

Description

technical field [0001] The invention relates to a transparent conductive film glass and a manufacturing method thereof. Background technique [0002] In recent years, the solar cell market has begun to promote the integration of building photovoltaics. Because crystalline silicon cells have different permeability and require strong light to generate electricity, thin-film cells have the advantage of low-light power generation compared with architectural applications, so they have potential for development. . [0003] At present, solar thin-film batteries are being produced and researched all over the world. The front electrode cover plate in the thin film battery module is currently made of transparent conductive film glass. There are currently two main production technologies for commercial transparent conductive film glass: [0004] One of the methods is to use a fluorine-doped tin dioxide film, which is manufactured mainly by depositing a layer of fluorine-doped tin dio...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03C17/34
Inventor 董清世黄华义
Owner XINYI PHOTOVOLTAIC IND (ANHUI) HLDG CO LTD
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