Flexible micro-positioning stage with two degrees of freedom

Abstract

The invention discloses a flexible micro-positioning stage with two degrees of freedom, the design of the flexible micro-positioning stage with two degrees of freedom comprises a flexible mechanism and an integral structure, two piezoelectric ceramic drivers are adopted in the structure, the tail part of each driver is connected with a base through a bolt, and the top end of each driver is connected with a spherical joint through a thread, thereby realizing Hertz contact. The flexible mechanism of the positioning stage mainly comprises three parts of the base, flexible branched chains with entirely consistent structures and a supporting movable platform thereof. Two displacement sensors are used for measuring actual output of the movable platform and respectively fixed between the base and the movable platform through an L-shaped support and a Z-shaped support. The flexible micro-positioning stage is characterized by high resolution and fast dynamic response speed, and can be taken as an auxiliary positioning platform of a nano-imprint lithography positioning system for realizing micro-feeding and precise positioning.

Description

technical field [0001] The invention relates to a micro-operating system, in particular to a flexible parallel micro-positioning workbench with two translational degrees of freedom, which can be applied to an imprint photolithography system. Background technique [0002] Nano-devices include nano-electronic devices and nano-optoelectronic devices, which can be widely used in electronics, optics, micro-mechanical devices, new computers, etc. It is the most dynamic research field in the field of new materials and new devices. , intelligence, high integration and other mainstream development directions. Due to the potential huge market and national defense value of nano-devices, the methods, approaches and processes of its design and manufacture have become the research and investment hotspots of many scientists, governments and large enterprises. At present, the design and manufacture of nano-devices is in a period of rapid development, and there are various methods, and patt...

AI Technical Summary

Problems solved by technology

Among these existing technologies, although the self-adaptive adjustment precision positioning system is simple in structure, compact in structure and low in cost, its positioning accuracy, especially the adjustment accuracy of parallelism is low, which limits the improvement of processing accuracy and quality

Although the parallelism between the imprint template and the substrate can be improved to a certain extent through active leveling and manual adjustment mechanisms, it cannot compensate for the parallelism error between the template and the substrate due to uneven imprint force during the imprinting process

The airbag cylinder type imprinting system overcomes the disadvantages that the silicone is easily stretched and deformed during the imprinting process, the imprinting force is unevenly distributed, and the template is easy to break. However, the design and use of the vacuum chamber is expensive and the imprinting time is too long.

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