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Grid electrode photoelectric integrated sensor for measuring high electric field

A grid electrode and optoelectronic integration technology, applied in the direction of electrostatic field measurement, voltage/current isolation, etc., can solve the problems of static operating point stability, sensor dielectric parameters, and measurement accuracy, etc., to improve measurement Effects of stability, size reduction, and high measurement accuracy

Active Publication Date: 2010-05-19
TSINGHUA UNIV
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Problems solved by technology

After research, it is found that due to the existence of the coating, when the external temperature changes, it will affect the dielectric parameters of the sensor, thereby affecting the stability of the static operating point of the sensor, which directly affects the accuracy of the measurement.

Method used

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  • Grid electrode photoelectric integrated sensor for measuring high electric field
  • Grid electrode photoelectric integrated sensor for measuring high electric field
  • Grid electrode photoelectric integrated sensor for measuring high electric field

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Embodiment Construction

[0021] The grid electrode photoelectric integrated sensor for strong electric field measurement proposed by the present invention has a structure such as Figure 4 with Figure 5 As shown, a wafer 5 with electro-optical effect is adopted, and an optical waveguide 6 with Y-shaped bifurcations at both ends and parallel to each other in the middle is formed on the surface of the wafer by titanium metal diffusion method or proton exchange method. A grid electrode 9 is provided above. The grid electrode 9 is composed of two transverse electrodes and a plurality of longitudinal electrodes connected to the transverse electrodes. The ratio of the width between the two transverse electrodes constituting the grid electrode to the width between the two parallel optical waveguides is For: 1:2~5, the width L of the longitudinal electrode 1 with the length L of the transverse electrode 2 The ratio is: L 2 : L 1 =1:10~30, the length L of the lateral electrode 2 The length L of the two ...

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Abstract

The invention relates to a grid electrode photoelectric integrated sensor for measuring a high electric field, and belongs to the technical field of high voltage measurement. In the sensor, a wafer with electro-optical effect is adopted; optical waveguides, which is branched at the two ends in a form of Y and is parallel in the middle, are formed on the surface of the wafer by a titanium metal diffusion method or a proton exchange method; and the grid electrode is arranged above one of two sections of parallel optical waveguides. The grid electrode consists of two transverse electrodes and a plurality of longitudinal electrodes connected with the transverse electrode. The grid electrode photoelectric integrated sensor for measuring the high electric field provided by the invention can measure the high electric field of higher than 100kV / m, and meanwhile reduces the effect of an Si-based coat on a static working point of the sensor under the electrode to the maximum extent, effectively improves the measuring stability thereof, reduces the dosage of gold and lowers the product cost.

Description

technical field [0001] The invention relates to a grid electrode photoelectric integrated sensor for strong electric field measurement, which is especially suitable for isolation and strong electric field measurement under the condition of high electric field amplitude, and belongs to the technical field of high voltage measurement. Background technique [0002] In the environment of high voltage or strong electromagnetic pulse, very strong transient electric field will be generated. The key component to measure it is the electric field sensor. The sensor not only needs to be able to overcome the insulation and electromagnetic interference problems in high-voltage and strong electromagnetic environments, but also needs to be able to accurately measure such high-amplitude transient strong electric fields. [0003] In the field of traditional high-voltage measurement, sensors based on the principle of electromagnetic induction are generally used. The strong electric field se...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R15/24G01R29/12
Inventor 曾嵘余占清王博王峰何金良张波牛犇
Owner TSINGHUA UNIV
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