Electric spark and electrolysis combined milling machining method of micro three-dimensional structure

Abstract

An electric spark and electrolysis combined milling machining method of a micro three-dimensional structure belongs to the technical field of micromachining, and is characterized in that a plurality of metal alloy material and complicated cavities and surfaces can be machined through adopting simple electrodes to operate the combined machining of micro electric spark milling and micro electrolysis milling by means of the layered milling principles. The combined machining method has two steps of fast finishing the most of machining through adopting the machining method of the micro electric spark closed-loop gap servo scanning and milling, then carrying out the residual machining through adopting the machining method of the micro electrolysis layered open-loop digital control scanning and milling, thereby finally finishing the shaping of a micro three-dimensional structure, wherein a machining electrode whose side wall is insulated is used in the electrolysis milling for improving the machining localization and machining precision. The method fully utilizes the advantages that the micro electric spark servo scanning and milling has fast machining speed, and the micro electrolysis digital control milling can not abrade the machining electrode, and has excellent surface machining quality.

Description

technical field [0001] The invention relates to an electric spark electrolytic machining process for a micro three-dimensional structure of a metal alloy material, which combines micro electric spark machining and micro electrolytic machining technologies, and belongs to the field of micro machining. Background technique [0002] The micro-three-dimensional structure of metal alloy materials is widely used in many fields; with the development of consumer electronics, automobiles, aerospace and other industries, especially the development of micro-electromechanical systems (MEMS) technology, for complex three-dimensional structure tiny parts and molds demand is increasing. The processing of this kind of millimeter-scale micro-3D structures for industrial applications needs to take into account the requirements of both processing efficiency and processing accuracy. At present, the processing of micro three-dimensional structures mainly includes mechanical milling methods, as ...

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Problems solved by technology

However, due to the existence of stray electric fields, and the inter-electrode current and voltage are not sensitive to the change of the gap, it is still difficult to directly realize the closed-loop servo control of electrode feeding with the processing gap as the object. In addition to insulating the wall to suppress stray corrosion, it is usually necessary to comprehensively adopt high-frequency pulse or even ultra-short pulse power supply, reduce voltage and electrolyte concentration and other technological measures to ensure processing accuracy and stability. At present, its micron and even sub-micron The ability of level machining accuracy, but this is at the cost of reducing machining efficiency

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