Process for producing silicane
A production process and silane technology, applied in the direction of silicon hydride, etc., can solve the problem of low silane conversion rate and achieve the effect of improving the conversion rate
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Embodiment 1
[0030] In the SAH raw material tank, SAH is diluted with DME to adjust the concentration to 7%, and the SAH flow rate is set to 77kg / min (kg / min). After cooling and dilution, SAH first enters the silane scrubber, and then enters the first reactor. React with the unreacted STF from the second reactor, the reaction product is divided into two parts, the first part is about 90-95% of the SAH flow, and returns to the first reactor through a filter and water cooler, To adjust the temperature of the reactor; the second part enters the second reactor to react with the raw material STF. The reaction conditions in the first reactor are that the temperature is 30-40° C. and the pressure is 0.03-0.06 MPa (megapascal). The reaction conditions in the second reactor are that the temperature is 45-55° C., and the pressure is 0.1-0.4 MPa. The flow rate of the raw material STF is 100 mol / min (mol / min). Both the first reactor and the second reactor are equipped with stirrers, and the stirring...
Embodiment 2
[0036] In the SAH raw material tank, SAH is diluted with DME to adjust the concentration to 10%, and the SAH flow rate is set to 54kg / min (kg / min). After cooling and dilution, SAH first enters the silane scrubber, and then enters the first reactor. React with the unreacted STF from the second reactor, the reaction product is divided into two parts, the first part is about 90-95% of the SAH flow, and returns to the first reactor through a filter and water cooler, To adjust the temperature of the reactor; the second part enters the second reactor to react with the raw material STF. The reaction conditions in the first reactor are that the temperature is 30-40° C. and the pressure is 0.06-0.08 MPa (megapascal). The reaction conditions in the second reactor are that the temperature is 45-55° C., and the pressure is 0.1-0.4 MPa. The flow rate of the raw material STF is 100 mol / min (mol / min). Both the first reactor and the second reactor are equipped with stirrers, and the stirrin...
Embodiment 3
[0043] In the SAH raw material tank, SAH is diluted with DME to adjust the concentration to 10%, and the SAH flow rate is set to 54kg / min (kg / min). After cooling and dilution, SAH first enters the silane washing tower, and then enters the first reactor. React with the unreacted STF from the second reactor, the reaction product is divided into two parts, the first part is about 90-95% of the SAH flow, and returns to the first reactor through a filter and water cooler, To adjust the temperature of the reactor; the second part enters the second reactor to react with the raw material STF. The reaction conditions in the first reactor are that the temperature is 30-40° C. and the pressure is 0.03-0.06 MPa (megapascal). The reaction conditions in the second reactor are that the temperature is 45-55° C., and the pressure is 0.1-0.4 MPa. The flow rate of the raw material STF is 100 mol / min (mol / min). Both the first reactor and the second reactor are equipped with stirrers, and the st...
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