Super-precision trans-scale in-situ nanometer indentation marking test system

Abstract

The invention relates to a super-precision trans-scale in-situ nanometer indentation marking test system which integrates driving, loading, detecting and micro-nanometer dynamic performance tests, super-precision marking processing and in-situ observation into a whole. The system mainly comprises an objective table, a regulation mechanism, a detection unit, a precise pressed-into driving unit, a detection unit of load signals and displacement signals and a high-resolution digital microscopic imaging system, wherein the objective table is precisely positioned along the directions of the X axis and the Y axis; the regulation mechanism and the precise pressed-into driving unit are in the direction of the Z axis and are assembled on a base; the high-resolution digital microscopic imaging system is used for observing the deforming and damaging conditions of the material in the storing and testing process; the objective table as well as the regulation mechanism and the precise pressed-into driving unit in the direction of the Z axis are assembled on a base; the high-resolution digital microscopic imaging system is arranged on the objective table; a precise dynamic sensor detecting the pressure of a diamond tool head pressed into a material and a sensor I detecting the precise displacement of the objective table in the directions of the X axis and the Y axis are arranged on the objective table; and a sensor II used for detecting the precise displacement of a diamond tool head in the direction of the Z axis of pressed-into depth is arranged on the base by a support I.

Description

technical field [0001] The invention relates to a high-performance comprehensive precision experimental testing system integrating driving, loading, detection, micro-nano mechanical performance testing, ultra-precision scribing processing and in-situ observation, especially related to the micromechanics of various test pieces or materials. The device for nano-indentation / scratch experiment, in-situ nano-indentation / scratch experiment and micro-nano-scale in-situ diamond scribing processing in the performance test is a precision scientific instrument integrating opto-mechanical and electrical integration. Precision instruments are the cornerstone and important guarantee for scientific and technological innovation and economic and social development. This invention is a special testing instrument for measuring and characterizing microscopic mechanical performance parameters of various test pieces or materials, and can be used in high-resolution digital microscopic imaging systems...

AI Technical Summary

Problems solved by technology

[0007] Regarding ex-situ mechanical testing techniques such as nanoindentation and nanoscratch, A.M.Minor and others from the University of California, Berkeley and Lawrence-Berkeley National Laboratory pointed out their shortcomings: due to the inability to use scanning electron microscopy and transmission electron microscopy High-resolution in-situ monitoring is carried out under (SEM, TEM), so it is impossible to study the correlation between deformation, damage, load and material performance parameters; There is a lack of in-depth research on the correlation law between performance parameters, which is urgently needed in the design and manufacture of tiny components

Limited to the technical level at that time, the device had a large structure and insufficient positioning accuracy; it could only monitor the deformation behavior and damage of the material, but could not test the mechanical parameters; Scale deformation and damage mechanism issues become possible

Since then, the researchers have pushed the doped diamond tool head through the piezoelectric drive mechanism to realize the in-situ nano-indentation test in the vacuum chamber of the electron microscope, and conducted experiments on single crystal silicon and other materials, and monitored the indentation load of the material. The whole process of deformation and internal defects, but their work also has some deficiencies: ①The amount of deformation (or displacement) is obtained through electron microscope observation, ②The loading force is obtained by the voltage applied to the piezoelectric element and the amount of deformation It is obtained through the conversion of the relationship; thus resulting in complex testing, too many offline operations, and reducing the credibility of the test results

But this research also has some deficiencies: ① there is an insurmountable backlash phenomenon in the driving mechanism (the backlash amplitude reaches 30-100nm); ② the loading resolution is insufficient (100mN), ③ tangential scratches cannot be detected force

At present, the commercial products of in-situ nanomechanical testing are only produced by Hysitron Company of the United States, which are very expensive and are also embargoed to my country; Parts must also be manufactured through complex and cumbersome processes such as "mask, corrosion, deposition", etc., and it is impossible to test three-dimensional specimens with feature sizes above millimeters

Due to factors such as scale effects in the test, it is not credible to use the test results of extremely small specimens to evaluate the comprehensive mechanical properties of larger-sized three-dimensional specimens

Images