Method for measuring large linear range data fusion by compound color ultra-resolved differential confocal

Abstract

The invention relates to a method for measuring large linearity measuring range data fusion by means of compound color super resolution differential confocal measurement, belonging to the ultraprecise three-dimensional microstructure surface measuring field; firstly, formula 1 and formula 2 are utilized to respectively calculate output information of a first and a second super resolution differential confocal measuring branches, wherein, formula 3 is the actual output light intensity information of a first and a second measuring branches which are respectively obtained by adopting a compound colour super resolution differential confocal measuring device, (the formula 1, the formula 2 and the formula 3 are shown at the upper right side); Gamma1 and Gamma2 are intercepted to obtain effective output Gamma1 and Gamma2, and finally a systemic linear output fusion function (see the formula 4) is constructed and is output as the systemic final displacement response, wherein, GammaB' is a shift factor, lambda1and lambda2 are the wavelength of the first and the second measuring branches. The method remains the advantages of high space resolution and inhibiting common mode additive noise and linear range extension of the compound colour super resolution differential confocal measuring, can inhibit interference of multiplicative noise, and can obtain output characteristic curve with better linearity and larger linear measurement range.

Description

technical field [0001] The invention belongs to the field of ultra-precision three-dimensional microstructure surface measurement, and mainly relates to a large linear range data fusion method for complex color super-resolution differential confocal measurement, which is applicable to ultra-precision non-contact measurement of three-dimensional microstructure characteristics of micro-optical electromechanical components . Background technique [0002] The confocal measurement technology was first proposed by M.Minsky in 1957, and obtained the US patent in 1961, the patent number US3013467, the basic technical idea is to suppress stray light by introducing a pinhole detector, and produce axial tomography The disadvantage of this technology is that the measurement sensitivity of the axial response signal is not high near the quasi-focus area of ​​the measurement surface, so it is only suitable for defocus displacement measurement. [0003] The basic technical feature of non-t...

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Problems solved by technology

[0005] The purpose of the present invention is to overcome the shortcomings of the existing complex-color super-resolution differential confocal measurement technology that does not consider the system multiplicative noise interference and the axial linear measurement range is still limited, and to provide a method that can retain the complex-color super-resolution differential The confocal measurement device has excellent characteristics of high spatial resolution, suppression of common-mode additive noise and linear range extension, and can suppress multiplicative noise interference to a certain extent, and obtain a full range with better linearity in the measurement area and a larger linear range Axial Response Linear Output Curve

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