Transmittance-adjustable half tone mask and method for manufacturing same
A technology of a halftone mask and a manufacturing method, which is applied in the field of halftone masks and its manufacture, and can solve problems such as rising manufacturing costs of halftone masks, aggravated manufacturing costs, and poor consistency of halftone layer thicknesses, achieving reduction in The effect of multiple experiments and adjustments, reducing manufacturing costs and improving production efficiency
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[0024] figure 1 It is a schematic structural diagram of the half-tone mask plate with adjustable transmittance of the present invention, figure 2 for figure 1 Middle A-A sectional view. Such as figure 1 , figure 2 As shown, the halftone reticle with adjustable transmittance includes a substrate 10. A transmissive area, a halftone area and a non-transmissive area are arranged on the substrate 10. A halftone area layer 1 is formed on the halftone area, and a layer 1 is formed on the non-transmissive area. The non-transmissive area layer 2, the area other than the half-tone area layer 1 and the non-transmission area layer 2 on the substrate 10 is a transmission area; wherein the half-tone area layer 1 is composed of several half-tone layers 11 and buffer layers 12, and the half-tone layer 11 and buffer layer 12 are deposited alternately in sequence, that is, a layer of buffer layer 12 is deposited on one layer of half-tone layer 11, and a layer of half-tone layer 11 is d...
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